Acta Optica Sinica, Volume. 43, Issue 14, 1422003(2023)
Optical Design of Helical Drilling System with Ultrashort Pulse Laser Based on Scanning Galvanometer
Figures & Tables(9)
Fig. 1. Distribution of the focusing light field of helical laser drilling system
Fig. 2. Schematic diagram of the initial structure of helical laser drilling lens
Fig. 4. Design results of the focusing light field for helical laser drilling lens
Fig. 5. Spot diagrams and wave aberration results of focusing light field for helical laser drilling lens, when diameter is 100 μm, 200 μm, and 400 μm, respectively. (a)-(c) Spot diagrams; (d)-(f) wave aberration results
Fig. 6. Analysis of back-focused ghost reflections of helical laser drilling lens
Table 1. Design specifications of helical laser drilling system
View tableTable 1. Design specifications of helical laser drilling system
System parameter Design specification Wavelength /nm 510-520 Pulse duration /fs 500 Beam quality M2 1.2 Focal length /mm 40 F number 10 Working distance /mm ≥30 Focal spot diameter /μm 15 Processing hole aperture range /μm 100-400 Wave aberration（RMS，515 nm） ≤0.05λ Total length /mm ≤520
Table 2. Tolerance analysis of helical laser drilling system
View tableTable 2. Tolerance analysis of helical laser drilling system
Lens number Machining tolerance Assembly tolerance Fringes /irregularity Thickness /mm Surface decenter /μm Element
tilt /（′）
Element
decenter /μm
Air space /mm Lens 1 Front surface 3/0.3 ±0.05 20 4 15 ±0.05 Rear surface 3/0.3 20 Lens 2 Front surface 3/0.3 ±0.05 20 4 15 ±0.05 Rear surface 3/0.3 20 Lens 3 Front surface 3/0.3 ±0.05 20 4 15 ±0.05 Rear surface 2/0.2 10 Lens 4 Front surface 2/0.2 ±0.05 20 4 15 ±0.05 Rear surface 2/0.2 10 Lens 5 Front surface 2/0.2 ±0.05 20 3 15 ±0.05 Rear surface 2/0.2 10 Lens 6 Front surface 2/0.2 ±0.05 10 3 15 ±0.05 Rear surface 2/0.2 20 Lens 7 Front surface 2/0.2 ±0.05 20 3 15 ±0.05 Rear surface 2/0.2 10 Lens 8 Front surface 3/0.3 ±0.05 20 3 15 ±0.05 Rear surface 3/0.3 20 Lens9 Front surface 2/0.2 ±0.05 10 3 15 ±0.05 Rear surface 2/0.2 20
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Jian Zhang, Jin Zhuo, Huiliang Jin, Hongjun Liu, Fei Fan, Qinghua Zhang, Qiao Xu. Optical Design of Helical Drilling System with Ultrashort Pulse Laser Based on Scanning Galvanometer[J]. Acta Optica Sinica, 2023, 43(14): 1422003
Paper Information
Category: Optical Design and Fabrication
Received: Feb. 6, 2023
Accepted: Apr. 10, 2023
Published Online: Jul. 13, 2023
The Author Email: Qiao Xu (xuq_rclf@163.com)
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