Optoelectronic Technology, Volume. 42, Issue 1, 28(2022)
Design and Experiment on Low Level Charge to Voltage Factor Structure of CCD
Figures & Tables(6)
Table 1. Designed and examined parameters of first design experiment
View tableView in ArticleTable 1. Designed and examined parameters of first design experiment
第一级放大器MOS管宽度/μm 第一级放大器MOS管长度/μm 输出节点FD电容面积/μm2 输出栅长/μm 复位栅长/μm 理论设计的CVF值/（μV/e-） 实际测试的CVF值/（μV/e-） 140 18 1480 120 15 0.25 0.48 90 14 1480 120 15 0.30 0.55 80 10 1480 120 15 0.35 0.63 70 8 1480 120 15 0.4 0.71 60 7 1480 120 15 0.45 0.81
Table 2. Designed and examined parameters of optimized structure
View tableView in ArticleTable 2. Designed and examined parameters of optimized structure
偏差比例因子 输出节点FD电容面积/μm2 第一级放大器MOS管宽度/μm 第一级放大器MOS管长度/μm FD电容和MOS电容对总电容贡献占比 理论设计的CVF/（μV/e-） 实际测试的CVF/（μV/e-） 0.92 3 050 290 18 0.062∶0.938 0.25 0.266 0.83 3 050 260 18 0.070∶0.930 0.30 0.314 0.80 3 050 220 18 0.079∶0.921 0.35 0.352 0.78 3 050 190 18 0.091∶0.909 0.40 0.413
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Xiaodong WANG, Chaomin WANG, Jia LI, Ge TU, Jin LI. Design and Experiment on Low Level Charge to Voltage Factor Structure of CCD[J]. Optoelectronic Technology, 2022, 42(1): 28
Paper Information
Category: Research and Trial-manufacture
Received: Jul. 17, 2021
Accepted: --
Published Online: Aug. 3, 2022
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