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Chinese Optics Letters, Volume. 13, Issue 10, 103101(2015)

Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

Kun Chen1, Huanfeng Zhu1, Xinyu Yi1, Shuai Cheng1, Jing Li1,2、*, Songyou Wang1,2, Ming Lu1,2, Min Xu1,2, Li Ma3, and Lei Lü4
Author Affiliations
  • 1Department of Optical Science and Engineering, Fudan University, Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Shanghai 200433, China
  • 2Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Shanghai 200433, China
  • 3College of Physical Science and Engineering, Tongji University, Shanghai 200092, China
  • 4Department of Medical Physics, Weifang Medical University, Shandong 261053, China
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    (a) The XRD patterns of the ZnO films under different annealing conditions. (b) The grain size of films annealed at different temperatures and the time calculated from peak (103).

    Fig. 1. (a) The XRD patterns of the ZnO films under different annealing conditions. (b) The grain size of films annealed at different temperatures and the time calculated from peak (103).

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    PL spectra of the films under different annealing conditions: (a) at different temperatures in nitrogen, (b) at 500°C in air, (c) at 700°C in nitrogen, (d) at 900°C in nitrogen, and (e) at 900°C in air.

    Fig. 2. PL spectra of the films under different annealing conditions: (a) at different temperatures in nitrogen, (b) at 500°C in air, (c) at 700°C in nitrogen, (d) at 900°C in nitrogen, and (e) at 900°C in air.

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    XPS profiles. (a)–(j) Oxygen and (k) zinc elements in the chosen samples.

    Fig. 3. XPS profiles. (a)–(j) Oxygen and (k) zinc elements in the chosen samples.

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    Comparison of the variation trend of RXPS and that of RPL in the ZnO films.

    Fig. 4. Comparison of the variation trend of RXPS and that of RPL in the ZnO films.

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    Kun Chen, Huanfeng Zhu, Xinyu Yi, Shuai Cheng, Jing Li, Songyou Wang, Ming Lu, Min Xu, Li Ma, Lei Lü, "Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering," Chin. Opt. Lett. 13, 103101 (2015)

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    Paper Information

    Category: Thin films

    Received: Apr. 18, 2015

    Accepted: Aug. 19, 2015

    Published Online: Sep. 13, 2018

    The Author Email: Jing Li (lijing@fudan.edu.cn)

    DOI:10.3788/COL201513.103101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology