[3] [3] YOO H W, VAN ROYEN M E, VAN CAPPELLE-N W A, et al.Automated spherical aberration correction in scanning confocal microscopy[J]. Rev Sci. Instrum., 2014, 85(12): 9.

[4] [4] WANG K, XIN H, CAO N, et al. Design of two-axis flexible support structure for fast steering mirror in space cameras[J]. Infrared and Laser Engineering, 2019, 48(12): 1214005.

[5] [5] CHEN W, CHEN S H, WU X, et al. System identification and control of fast steering mirror based on voice coil actuators[J]. Applied Mechanics and Materials, 2014, 446: 1227-1233.

[6] [6] SHINSHI T, SHIMIZU D, KODEKI K, et al. A fast steering mirror using a compact magnetic suspension and voice coil motors for observation satellites[J]. Electronics, 2020, 9(12): 11.

[7] [7] YU H P, LIU Y X, DENG J, et al. A novel piezo-electric stack for rotary motion by d(15) working mode: principle, modeling, simulation, and experiments[J]. IEEE-ASME Trans Mechatron., 2020, 25(2): 491-501.

[9] [9] CHANG Q B, CHEN W S, LIU J K, et al. Development of a novel two-DOF piezo-driven fast steering mirror with high stiffness and good decoupling characteristic[J]. Mechanical Systems and Signal Processing,2021, 159: 107851.

[10] [10] XIANG S, CHEN S, WU X, et al. Study on fast linear scanning for a new laser scanner[J]. Optics and Laser Technology, 2010, 42(1): 42-48.

[11] [11] YUAN G, WANG D H, LI S D. Single piezoelectric ceramic stack actuator based fast steering mirror with fixed rotation axis and large excursion angle[J]. Sens. Actuator A-Phys., 2015, 235: 292-299.

[12] [12] SHAO S B, TIAN Z, SONG S Y, et al. Two-degrees-of-freedom piezodriven fast steering mirror with cross-axis decoupling capability[J]. Rev.Sci. Instrum., 2018, 89(5): 10.

[13] [13] KIM H S, LEE D H, HUR D J, et al. Development of two-dimensional piezoelectric laser scanner with large steering angle and fast response characteristics[J]. Rev Sci. Instrum., 2019, 90(6): 9.

[15] [15] CHANG Y H, HAO G B, LIU C S. Design and characterization of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization[J]. Sens. Actuator APhys.,2021, 322: 11.

[16] [16] CSENCSICS E, SITZ B, SCHITTER G. Integration of control design and system operation of a high performance piezo-actuated fast steering mirror[J]. IEEE-ASME Trans. Mechatron., 2020, 25(1): 239-247.

[18] [18] LUO Y, REN W, HUANG Y M, et al. Feedforward control based on error and disturbance observation for the CCD and fiber-optic gyroscope-based mobile optoelectronic tracking system[J]. Electronics,2018, 7(10): 223.