[1] Tian S C, Ahamed M, Larisch G et al. Novel energy-efficient designs of vertical-cavity surface emitting lasers for the next generations of photonic systems[J]. Japanese Journal of Applied Physics, 61, SK0801(2022).

[2] Qiu J Y, Wu D F, Wang H L et al. Advanced single-mode 850 nm VCSELs for record NRZ and PAM4 data rate on SMF-28 fiber up to 1 km[C](2021).

[3] Wu D F, Yu X, Wu H N et al. Single-mode 850 nm VCSELs demonstrate 96 Gb/s PAM4 OM4 fiber link for extended reach to 1 km[C](2022).

[4] Debernardi P, Ostermann J M, Feneberg M et al. Reliable polarization control of VCSELs through monolithically integrated surface gratings: a comparative theoretical and experimental study[J]. IEEE Journal of Selected Topics in Quantum Electronics, 11, 107-116(2005).

[5] Huang M C Y, Zhou Y, Chang-Hasnain C J. A surface-emitting laser incorporating a high-index-contrast subwavelength grating[J]. Nature Photonics, 1, 119-122(2007).

[6] Chen C C, Liaw S J, Yang Y J. Stable single-mode operation of an 850-nm VCSEL with a higher order mode absorber formed by shallow Zn diffusion[J]. IEEE Photonics Technology Letters, 13, 266-268(2001).

[7] Chen C C, Liaw S J, Yang Y J et al. High power stable single-fundamental mode vertical cavity surface-emitting lasers with a zinc diffused absorber[C], 151(2003).

[8] Shih J C, Khan Z, Chang Y H et al. High-brightness VCSEL arrays with inter-mesa waveguides for the enhancement of efficiency and high-speed data transmission[J]. IEEE Journal of Selected Topics in Quantum Electronics, 28, 1501211(2022).

[9] Huang Y Y, Chang Y H, Zhao Y C et al. Low-noise, single-polarized, and high-speed vertical-cavity surface-emitting lasers for very short reach data communication[J]. Journal of Lightwave Technology, 40, 3845-3854(2022).

[10] Ge C, Zhang B X, Gu X D et al. Full 3-inch wafer processed 1060 nm single-mode transverse coupled-cavity VCSEL for data transmission in standard 1300 nm single-mode fiber[C](2023).

[11] Ge C, Dong L, Gu X D et al. 1060 nm single-mode intra-cavity metal-aperture VCSEL for over 2 km standard 1300 nm SMF transmission[C](2023).

[12] Shimizu S, Ge C, Dong L et al. Record high-baud-rate 128-Gbit/s NRZ-OOK direct modulation of 1060-nm single-mode VCSEL for transmission over 2-km standard SMF[C](2023).

[13] Imada M, Noda S, Chutinan A et al. Coherent two-dimensional lasing action in surface-emitting laser with triangular-lattice photonic crystal structure[J]. Applied Physics Letters, 75, 316-318(1999).

[14] Yoshida M, Katsuno S, Inoue T et al. High-brightness scalable continuous-wave single-mode photonic-crystal laser[J]. Nature, 618, 727-732(2023).

[15] Michalzik R[M]. VCSELs: fundamentals, technology and applications of vertical-cavity surface-emitting lasers(2013).

[16] Moharam M G, Gaylord T K. Diffraction analysis of dielectric surface-relief gratings[J]. Journal of the Optical Society of America, 72, 1385-1392(1982).

[17] Mukaihara T, Ohnoki N, Hayashi Y et al. Polarization control of vertical-cavity surface emitting lasers using a birefringent metal/dielectric polarizer loaded on top distributed Bragg reflector[J]. IEEE Journal of Selected Topics in Quantum Electronics, 1, 667-673(1995).

[18] Goeman S, Boons S, Dhoedt B et al. First demonstration of highly reflective and highly polarization selective diffraction gratings (GIRO-gratings) for long-wavelength VCSELs[J]. IEEE Photonics Technology Letters, 10, 1205-1207(1998).

[19] Debernardi P, Bava G P. Coupled mode theory: a powerful tool for analyzing complex VCSELs and designing advanced device features[J]. IEEE Journal of Selected Topics in Quantum Electronics, 9, 905-917(2003).

[20] Michalzik R, Ostermann J M, Debernardi P et al. Polarization-controlled monolithic oxide-confined VCSELs[J]. Proceedings of SPIE, 5453, 182-196(2004).

[21] Ostermann J M, Debernardi P, Jalics C et al. Monolithic polarization control of multimode VCSELs by a dielectric surface grating[J]. Proceedings of SPIE, 5364, 201-212(2004).

[22] Ostermann J M, Rinaldi F, Debernardi P et al. VCSELs with enhanced single-mode power and stabilized polarization for oxygen sensing[J]. IEEE Photonics Technology Letters, 17, 2256-2258(2005).

[23] Ostermann J M, Debernardi P, Jalics C et al. Surface gratings for polarization control of single- and multi-mode oxide-confined vertical-cavity surface-emitting lasers[J]. Optics Communications, 246, 511-519(2005).

[24] Liao W Y, Li C C, Li J et al. Polarization control and mode optimization of 850 nm multi-mode VCSELs using surface grating[J]. Applied Physics B, 127, 23(2021).

[25] Zhang X, Zhang G R, Wen Y et al. 50 Gbit/s PAM4 data transmission over 500-m single-mode fiber using an 880-nm single mode VCSEL[J]. IEEE Photonics Technology Letters, 34, 1210-1213(2022).

[26] Brown S N. Theory and simulation of subwavelength high contrast gratings and their applications in vertical-cavity surface-emitting laser devices[D], 6-12(2021).

[27] Gustavsson J S, Haglund A, Vukusić J et al. Efficient and individually controllable mechanisms for mode and polarization selection in VCSELs, based on a common, localized, sub-wavelength surface grating[J]. Optics Express, 13, 6626-6634(2005).

[28] Haglund A, Gustavsson J S, Bengtsson J et al. Design and evaluation of fundamental-mode and polarization-stabilized VCSELs with a subwavelength surface grating[J]. IEEE Journal of Quantum Electronics, 42, 231-240(2006).

[29] Gustavsson J S, Larsson A, Jedrasik P et al. Mode and polarisation control in VCSELs using shallow surface structures[J]. IET Optoelectronics, 1, 197-205(2007).

[30] Haglund E, Jahed M, Gustavsson J S et al. High-power single transverse and polarization mode VCSEL for silicon photonics integration[J]. Optics Express, 27, 18892-18899(2019).

[31] Bader S, Herper M, Weigl A et al. Polarization-stable VCSEL-arrays[C](2022).

[32] Mateus C F R, Huang M C Y, Deng Y F et al. Ultrabroadband mirror using low-index cladded subwavelength grating[J]. IEEE Photonics Technology Letters, 16, 518-520(2004).

[33] Li K, Chase C, Qiao P F et al. Widely tunable 1060-nm VCSEL with high-contrast grating mirror[J]. Optics Express, 25, 11844-11854(2017).

[34] Liu A J, Zhang J, Hao C X et al. Surface-emitting lasers with surface metastructures[J]. Photonics, 10, 509(2023).

[35] Huang X L, Wu C Y, Xu X L et al. Polarization structured light 3D depth image sensor for scenes with reflective surfaces[J]. Nature Communications, 14, 6855(2023).

[36] Ledentsov N,, Chorchos L, Agustin M et al. 850 nm single-mode VCSEL for error-free 60 Gbit/s OOK operation and transmission through 800 m of multi-mode fiber[C](2019).

[37] Peng C Y, Qiu J Y, Huang T Y et al. 850-nm single-mode vertical-cavity surface-emitting lasers for 40 Gb/s error-free transmission up to 500 m in OM4 fiber[J]. IEEE Electron Device Letters, 41, 84-86(2020).

[38] Xu H Y, Tian S C, Han S Y et al. 53 Gbit/s high speed single mode 940 nm vertical-cavity surface-emitting laser[J]. Chinese Journal of Luminescence, 43, 1114-1120(2022).

[39] Simpanen E, Gustavsson J S, Larsson A et al. 1060 nm single-mode VCSEL and single-mode fiber links for long-reach optical interconnects[J]. Journal of Lightwave Technology, 37, 2963-2969(2019).

[40] Su P, Pikul K P, Kraman M D et al. High-power single-mode vertical-cavity surface-emitting lasers using strain-controlled disorder-defined apertures[J]. Applied Physics Letters, 119, 241101(2021).

[41] Khan Z, Yen J L, Cheng C L et al. Enhancing the static and dynamic performance of high-speed VCSELs by Zn-diffused shallow surface relief apertures[J]. IEEE Journal of Quantum Electronics, 54, 2400706(2018).

[42] Cheng C L, Ledentsov N, Khan Z et al. Ultrafast Zn-diffusion and oxide-relief 940 nm vertical-cavity surface-emitting lasers under high-temperature operation[J]. IEEE Journal of Selected Topics in Quantum Electronics, 25, 1700507(2019).

[43] Shi J W, Chen C C, Wu Y S et al. High-power and high-speed Zn-diffusion single fundamental-mode vertical-cavity surface-emitting lasers at 850-nm wavelength[J]. IEEE Photonics Technology Letters, 20, 1121-1123(2008).

[44] Shi J W, Chen C C, Wu Y S et al. The influence of Zn-diffusion depth on the static and dynamic behavior of Zn-diffusion high-speed vertical-cavity surface-emitting lasers at an 850 nm wavelength[J]. IEEE Journal of Quantum Electronics, 45, 800-806(2009).

[45] Shi J W, Weng W C, Kuo F M et al. High-performance Zn-diffusion 850-nm vertical-cavity surface-emitting lasers with strained InAlGaAs multiple quantum wells[J]. IEEE Photonics Journal, 2, 960-966(2010).

[46] O’Brien T, Kesler B, Al Mulla S et al. Mode behavior of VCSELs with impurity-induced disordering[J]. IEEE Photonics Technology Letters, 29, 1179-1182(2017).

[47] Shi J W, Khan Z, Horng R H et al. High-power and single-mode VCSEL arrays with single-polarized outputs by using package-induced tensile strain[J]. Optics Letters, 45, 4839-4842(2020).

[48] Dalir H, Koyama F. 29 GHz directly modulated 980 nm vertical-cavity surface emitting lasers with bow-tie shape transverse coupled cavity[J]. Applied Physics Letters, 103, 4839-4842(2013).

[49] Ibrahim H R, Hassan A M A, Gu X D et al. 1060 nm single-mode metal-aperture VCSEL array with transverse resonance and low power consumption below 50 fJ/bit[C](2021).

[50] Ibrahim H R, Hassan A, Gu X D et al. 1060 nm single-mode metal aperture VCSEL array with transverse resonance for 5 km single-mode fiber transmission[C](2021).

[51] Dong L, Gu X D, Koyama F. 16-ch 1060-nm single-mode bottom-emitting metal-aperture VCSEL array for co-packaged optics[C], W4B.3(2023).

[52] Hu S T, Gu X D, Ibrahim H R et al. 1060 nm single-mode transverse coupled cavity VCSEL with surface relief engineering for 80 Gbps PAM4 modulation[C](2022).

[53] Larisch G, Tian S C, Bimberg D. Radiation emitter[P].

[54] Larisch G, Tian S C, Bimberg D. Radiation emitter[P].

[55] Mansoor A, Tian S C, Lindner J et al. Multi-aperture VCSELs: high power, low resistance, single mode[C](2021).

[56] Coldren L A, Corzine S W, Mašanović M L[M]. Diode lasers and photonic integrated circuits(2012).

[57] Dalir H, Koyama F. Bandwidth enhancement of single-mode VCSEL with lateral optical feedback of slow light[J]. IEICE Electronics Express, 8, 1075-1081(2011).

[58] Hirano G, Koyama F, Hasebe K et al. Slow light modulator with Bragg reflector waveguide[C], PDP34(2007).

[59] Hassan A M A, Gu X D, Nakahama M et al. High power and high beam quality surface grating VCSEL[C](2021).

[60] Hu S T, Hassan A, Gu X D et al. Surface grating loaded VCSEL with single mode power of over 80 mW[J]. IEICE Electronics Express, 18, 20210202(2021).

[61] Ge C, Hassan A M A, Hu S T et al. Modeling of surface grating-loaded VCSEL with slowing light[J]. Japanese Journal of Applied Physics, 61, SK1010(2022).

[62] Hu S T, Gu X D, Hassan A et al. Ultra-compact VCSEL scanner for high power solid-state beam steering[J]. Optics Express, 30, 8742-8749(2022).

[63] Zhao G W, Yang J, Hegblom E et al. Multi-junction VCSEL arrays with high performance and reliability for mobile and automotive 3D sensing applications[J]. Proceedings of SPIE, 11704, 117040A(2021).

[64] Kotaki Y, Uchiyama S, Iga K. GaInAsP/InP surface emitting laser with two active layers[C], 133-136(1984).

[65] Ghods A, Dummer M, Xu G Y et al. Design and fabrication of single-mode multi-junction 905 nm VCSEL with integrated anti-phase mode filter[J]. Journal of Lightwave Technology, 41, 3102-3107(2023).

[66] Dummer M M, Ghods A, Xu G Y et al. Single-mode multi-junction VCSELs with integrated transverse mode filter[J]. Proceedings of SPIE, 12439, 1243908(2023).

[67] Yen J L, Chi K L, Jiang J W et al. Single-mode vertical-cavity surface-emitting lasers array with Zn-diffusion aperture for high-power, single-spot, and narrow divergence angle performance[J]. IEEE Journal of Quantum Electronics, 50, 1-8(2014).

[68] Khan Z, Shih J C, Chao R L et al. High-brightness and high-speed vertical-cavity surface-emitting laser arrays[J]. Optica, 7, 267-275(2020).

[69] Dallesasse J M, Su P, Pikul K P et al. Achieving high-power single-mode operation in vertical-cavity surface-emitting lasers via scalable, higher-order mode suppression techniques[J]. ECS Transactions, 109, 15-26(2022).

[70] Larisch G, Tian S C, Bimberg D. Radiation emitter[P].

[71] Larisch G, Tian S C, Bimberg D. Radiation emitter[P].

[72] Tian S C, Ahamed M, Bimberg D. Progress in short wavelength energy-efficient high-speed vertical-cavity surface-emitting lasers for data communication[J]. Photonics, 10, 410(2023).

[73] Meier M, Mekis A, Dodabalapur A et al. Laser action from two-dimensional distributed feedback in photonic crystals[J]. Applied Physics Letters, 74, 7-9(1999).

[74] Noda S, Yokoyama M, Imada M et al. Polarization mode control of two-dimensional photonic crystal laser by unit cell structure design[J]. Science, 293, 1123-1125(2001).

[75] Hirose K, Liang Y, Kurosaka Y et al. Watt-class high-power, high-beam-quality photonic-crystal lasers[J]. Nature Photonics, 8, 406-411(2014).

[76] Yoshida M, De Zoysa M, Ishizaki K et al. Double-lattice photonic-crystal resonators enabling high-brightness semiconductor lasers with symmetric narrow-divergence beams[J]. Nature Materials, 18, 121-128(2019).

[77] Itoh Y, Kono N, Fujiwara N et al. Low-threshold single-mode lasing from InP-based double-lattice photonic crystal surface emitting lasers with high-aspect-ratio air holes[C](2021).

[78] Itoh Y, Kono N, Fujii K et al. High-power single-mode operation of 1.3 μm wavelength double-lattice photonic-crystal surface-emitting lasers using InP-based regrowth process[C](2022).

[79] Inoue T, Yoshida M, Gelleta J et al. General recipe to realize photonic-crystal surface-emitting lasers with 100-W-to-1-kW single-mode operation[J]. Nature Communications, 13, 3262(2022).

[80] Zhou M, Kumar K A R, Pan M S et al. Increasing the Q-contrast in large photonic crystal slab resonators using bound-states-in-continuum[J]. ACS Photonics, 10, 1519-1528(2023).

[81] Ishimura S, Morita R, Inoue T et al. Proposal and demonstration of free-space optical communication using photonic crystal surface-emitting lasers[J]. Journal of Lightwave Technology, 41, 3688-3694(2023).

[82] Inoue T, Yoshida M, Zoysa M D et al. Design of photonic-crystal surface-emitting lasers with enhanced in-plane optical feedback for high-speed operation[J]. Optics Express, 28, 5050-5057(2020).

[83] Peng C Y, Cheng H T, Hong Y H et al. Performance analyses of photonic-crystal surface-emitting laser: toward high-speed optical communication[J]. Nanoscale Research Letters, 17, 90(2022).

[84] Jia X L, Kapraun J, Wang J X et al. Metasurface reflector enables room-temperature circularly polarized emission from VCSEL[J]. Optica, 10, 1093-1099(2023).

[85] Xie Y Y, Ni P N, Wang Q H et al. Metasurface-integrated vertical cavity surface-emitting lasers for programmable directional lasing emissions[J]. Nature Nanotechnology, 15, 125-130(2020).