Real-Time Exposure Dose Control Algorithm for DUV Excimer Lasers

Acta Optica Sinica, Volume. 26, Issue 6, 878(2006)

[in Chinese]^1,2、* and [in Chinese]^1,2

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[in Chinese], [in Chinese]. Real-Time Exposure Dose Control Algorithm for DUV Excimer Lasers[J]. Acta Optica Sinica, 2006, 26(6): 878

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Paper Information

Category: Optical Design and Fabrication

Received: Jun. 7, 2005

Accepted: --

Published Online: Jun. 13, 2006

The Author Email: (shyliu@mail.hust.edu.cn)

DOI:

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