Acta Optica Sinica, Volume. 30, Issue 5, 1473(2010)
Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation
[1] [1] Li Shengyi,Liu Zonglin,Wu Xuezhong. Developments of micro accelerometer research[J]. National University of Defense Technology,2004,26(6)
[2] [2] DongSam Park,DaeJin Yun. An experimental study on the fabrication of glass-based acceleration sensor body using Micro powder blasting method[J]. Sensors,2007,7:697-707
[3] [3] Y. H. Cho. Silicon micromachining technology and industrial MEMS applications[J]. Journal of the Korean Society for Precision Engineering,2000,17:52-58
[4] [4] ShihChu Huang,WuuWen Lin,Mao Hsiung Chen. Phase sensitivity normalization in time-division multiplexing of polarization-insensitive interferometric sensors using phase-generated carrier demodulation[J]. Opt. Engin.,1996,35(9):2634-2640
[5] [5] Allen C. Cekorich,Ira J. Bush. Demodulator and Method useful for Multiplexed Optical Sensors[P]. U. S. Patent 5,903,350. 1999-05-11[2009-06-02]http://www.freepatentsonline.com/5903350.html
[6] [6] Xiao Gang,Xie Tiebang,WangXuanze. A compact phase grating interference (PGI) sensor for micro-displacement[J]. Measurment Technique,2005,2005(1):7-9
[7] [7] G. Johannesh. Technology and applications of grating interferometers in high-precision measurement[J]. Precis Eng.,1992,14(3):147-154
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Chen Liuhua, Lin Qiao, Li Shu, Ni Wei, Wu Xingkun. Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation[J]. Acta Optica Sinica, 2010, 30(5): 1473
Category: Optical Devices
Received: Jun. 2, 2009
Accepted: --
Published Online: May. 11, 2010
The Author Email: Liuhua Chen (clh.osk@gmail.com)