Fig. 1. Schematic of holographic optical lithography system

Fig. 2. Schematic of holographic projection on tilted plane

Fig. 3. Flow chart of the iterative optimization algorithm

Fig. 4. Comparison of speckle elimination effect

Fig. 5. Relationship between the number of hologram and RMSE

Fig. 6. Experimental system

Fig. 7. Lithography on a 45° tilted surface

Fig. 8. Optical micrographs of the exposed and developed results

Fig. 9. Experiment of spherical lithography