Fig. 1. Schematic diagram of the CL-TWE MZM based on InP-MQW optical waveguides.

Fig. 2. Calculated effective refractive index of the InP-MQW optical waveguide for TE00 mode and TE01 mode with different waveguide widths.

Fig. 3. Schematic process flow of the fabrication of CL-TWE EO MZM based on InP-MQW optical waveguides.

Fig. 4. Photographs of the fabricated 3 in. CL-TWE MZM chip and a single MZM chip based on InP-MQW optical waveguides.

Fig. 5. 45° SEM view of an InP-MQW optical waveguide etched to the n-InP layer without the following processes. Inset: the measured light spot of the InP-MQW optical waveguide.

Fig. 6. Measured Vπ and ER characteristics of the InP-MQW EO MZM.

Fig. 7. EO response of the InP-MQW EO MZM.