Optics and Precision Engineering, Volume. 33, Issue 13, 2020(2025)

Miniaturized near-infrared spectrometer based on MEMS-FPI sensor

Ben LI1,2、*, Fangfang CHEN1, Fei WANG1,2, Zansheng ZHENG3, Yibo ZOU4, and Yiting YU1,2、*
Author Affiliations
  • 1Key Laboratory of Scale Manufacturing Technologies for High-Performance MEMS Chips of Zhejiang Province, Key Laboratory of Optical Microsystems and Application Technologies of Ningbo City, Ningbo Institute of Northwestern Polytechnical University, Ningbo3503, China
  • 2Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an71007, China
  • 3Ningbo Chemgoo Pharma Tech Co.,Ltd, Ningbo1510, China
  • 4Ningbo Smartflow Co., LTD, Ningbo315103, China
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    Figures & Tables(17)
    Physical image and typical response curve of C14272 sensor
    Circuit functional block of MEMS-FPI near-infrared spectrometer
    Prototype of MEMS-FPI near-infrared spectrometer
    Response curves of spectrometer under 10 levels of adjustable light source intensity
    Resolution measurement result of spectrometer with 1 550 nm narrow-band filter
    Measurement results of wavelength accuracy and repeatability of spectrometer
    Full-band photometric repeatability test results of MEMS-FPI spectrometer
    Photometric repeatability curve at 1 450 nm
    Dynamic range testing results of MEMS-FPI near-infrared spectrometer
    Experimental setup for glucose concentration detection
    Spectral data processing of glucose solutions
    Loss curves during CNN model training
    Glucose concentration prediction results of CNN model
    Comparison of prediction performance between CNN and PLS models
    • Table 1. Photometric repeatability testing results of developed MEMS-FPI spectrometer

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      Table 1. Photometric repeatability testing results of developed MEMS-FPI spectrometer

      波长/nm平均吸光度标准偏差相对标准偏差最小值最大值极差
      1 450.00.713 50.000 30.041 80.713 10.714 30.001 2
      1 550.00.683 10.004 90.714 10.676 80.695 60.018 8
      1 600.00.435 20.006 11.392 70.427 20.450 90.023 7
    • Table 2. Performance comparison between MEMS-FPI spectrometer and C17552 spectrometer

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      Table 2. Performance comparison between MEMS-FPI spectrometer and C17552 spectrometer

      光谱仪光谱分辨率/nm波长重复性/nm光度重复性/%动态范围/dB
      MEMS-FPI15.17±0.01±0.030.8745.5
      滨松C1755215.02±0.01±0.050.7347.3
    • Table 3. Performance comparison between CNN models with different parameter configurations and PLS model

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      Table 3. Performance comparison between CNN models with different parameter configurations and PLS model

      模型训练周期卷积核大小成分数R2RMSE(%)MAE(%)MAPERPDSEP(%)PRE(%)
      PLS//70.995 30.341 10.297 02.557 414.634 30.340 92.344 7
      CNN30011/0.995 50.332 80.292 82.755 915.094 90.330 52.311 4
      CNN30015/0.998 00.220 60.188 82.045 822.764 40.219 21.490 1
      CNN30019/0.992 40.434 90.366 23.210 319.338 40.258 02.891 1
      CNN50011/0.998 10.216 80.156 71.662 424.676 00.202 21.236 7
      CNN50015/0.996 00.314 90.255 42.255 617.424 10.286 32.016 1
      CNN50019/0.999 00.158 40.128 11.424 533.965 20.146 91.011 6
      CNN1 00011/0.998 30.208 50.165 61.497 823.932 40.208 51.307 5
      CNN1 00015/0.998 10.215 20.192 11.974 723.604 10.211 41.516 2
      CNN1 00019/0.998 70.181 80.141 31.629 427.843 10.179 21.115 8
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    Ben LI, Fangfang CHEN, Fei WANG, Zansheng ZHENG, Yibo ZOU, Yiting YU. Miniaturized near-infrared spectrometer based on MEMS-FPI sensor[J]. Optics and Precision Engineering, 2025, 33(13): 2020

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    Paper Information

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    Received: Apr. 9, 2025

    Accepted: --

    Published Online: Aug. 28, 2025

    The Author Email: Ben LI (yyt@nwpu.edu.cn)

    DOI:10.37188/OPE.20253313.2020

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