Optics and Precision Engineering, Volume. 33, Issue 13, 2020(2025)

Miniaturized near-infrared spectrometer based on MEMS-FPI sensor

Ben LI1,2、*, Fangfang CHEN1, Fei WANG1,2, Zansheng ZHENG3, Yibo ZOU4, and Yiting YU1,2、*
Author Affiliations
  • 1Key Laboratory of Scale Manufacturing Technologies for High-Performance MEMS Chips of Zhejiang Province, Key Laboratory of Optical Microsystems and Application Technologies of Ningbo City, Ningbo Institute of Northwestern Polytechnical University, Ningbo3503, China
  • 2Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an71007, China
  • 3Ningbo Chemgoo Pharma Tech Co.,Ltd, Ningbo1510, China
  • 4Ningbo Smartflow Co., LTD, Ningbo315103, China
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    Traditional near-infrared spectrometers are bulky and expensive, limiting their widespread application. Based on Hamamatsu's MEMS-FPI near-infrared spectroscopy sensor C14272, this research successfully developed a miniaturized near-infrared spectrometer operating in the 1350-1650 nm wavelength range. The system adopts a modular architecture, integrating efficient signal acquisition and data processing units, significantly reducing system costs. Through systematic performance evaluation, including wavelength accuracy, spectral resolution, dynamic range, and other metrics, combined with a temperature characteristic compensation algorithm that effectively suppresses temperature drift effects, experimental results demonstrate that this spectroscopic analysis system possesses excellent stability and reproducibility, with a spectral resolution of approximately 15.2 nm. Combined with a convolutional neural network algorithm, the glucose solution concentration prediction model exhibits high accuracy (R²>0.99) and low error rates (RMSE<0.2%) when detecting unknown samples. The developed miniaturized near-infrared spectrometer provides an economical and efficient solution for biomedical detection and food quality analysis.

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    Ben LI, Fangfang CHEN, Fei WANG, Zansheng ZHENG, Yibo ZOU, Yiting YU. Miniaturized near-infrared spectrometer based on MEMS-FPI sensor[J]. Optics and Precision Engineering, 2025, 33(13): 2020

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    Paper Information

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    Received: Apr. 9, 2025

    Accepted: --

    Published Online: Aug. 28, 2025

    The Author Email: Ben LI (yyt@nwpu.edu.cn)

    DOI:10.37188/OPE.20253313.2020

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