Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

Wanli Zhang; Feng Shi; Ci Song; Ye Tian; Shuangpeng Guo

doi:10.1155/2022/3740391

Laser and Particle Beams, Volume. 2022, Issue 3, 3740391(2022)

Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

Wanli Zhang, Feng Shi, Ci Song, Ye Tian, and Shuangpeng Guo

Laboratory of Science and Technology on Integrated Logistics Support College of Intelligence Science and Technology National University of Defense Technology Changsha Hunan Province 410073 China

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Wanli Zhang, Feng Shi, Ci Song, Ye Tian, Shuangpeng Guo. Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique[J]. Laser and Particle Beams, 2022, 2022(3): 3740391

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Paper Information

Category: Research Articles

Received: Apr. 21, 2022

Accepted: Jun. 22, 2022

Published Online: Oct. 12, 2022

The Author Email:

DOI:10.1155/2022/3740391

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology