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Acta Optica Sinica, Volume. 41, Issue 12, 1205002(2021)

Diffraction Efficiency of Diffractive Optical Elements with Antireflection Coatings Within a Certain Incident Angle Range

Liangliang Yang*, Chenglin Liu, Fahua Shen, and Yongbing Zhao
Author Affiliations
  • School of Physics and Electronic Engineering, Yancheng Teachers University, Yancheng, Jiangsu 224007, China
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    Figures&Tables (13)
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    References (20)
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    Figures & Tables(13)
    Profile of single layer DOE with antireflection coatings. (a) Profile of DOE with antireflection coatings; (b) four layers antireflection coatings

    Fig. 1. Profile of single layer DOE with antireflection coatings. (a) Profile of DOE with antireflection coatings; (b) four layers antireflection coatings

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    Structure of multilayer DOEs with antireflection coatings

    Fig. 2. Structure of multilayer DOEs with antireflection coatings

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    Diffraction efficiency of single layer DOEs with antireflection coatings. (a) ZnSe; (b) ZnS

    Fig. 3. Diffraction efficiency of single layer DOEs with antireflection coatings. (a) ZnSe; (b) ZnS

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    Modified diffraction efficiency of single layer DOEs. (a) ZnSe; (b) ZnS

    Fig. 4. Modified diffraction efficiency of single layer DOEs. (a) ZnSe; (b) ZnS

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    Modified microstructure height of single layer DOEs. (a) ZnSe; (b) ZnS

    Fig. 5. Modified microstructure height of single layer DOEs. (a) ZnSe; (b) ZnS

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    Modified PIDE of single layer DOEs. (a) 0°-15°; (b) 0°-30°

    Fig. 6. Modified PIDE of single layer DOEs. (a) 0°-15°; (b) 0°-30°

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    Diffraction efficiency of multilayer DOEs. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency; (c) modified diffraction efficiency

    Fig. 7. Diffraction efficiency of multilayer DOEs. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency; (c) modified diffraction efficiency

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    Modified microstructure heights of multilayer DOEs. (a) ZnSe; (b) ZnS

    Fig. 8. Modified microstructure heights of multilayer DOEs. (a) ZnSe; (b) ZnS

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    Modified diffraction efficiency versus incident angle for multilayer DOEs. (a) 0°-10°; (b) 0°-20°

    Fig. 9. Modified diffraction efficiency versus incident angle for multilayer DOEs. (a) 0°-10°; (b) 0°-20°

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    Modified PIDE versus incident angle for multilayer DOEs . (a) 0°-10°; (b) 0°-20°

    Fig. 10. Modified PIDE versus incident angle for multilayer DOEs . (a) 0°-10°; (b) 0°-20°

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    • Table 1. Average polychromatic integral diffraction efficiency (PIDE)and modified microstructure height of single layer DOEs

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      Table 1. Average polychromatic integral diffraction efficiency (PIDE)and modified microstructure height of single layer DOEs

      ParameterZnSeZnS
      θ=0°θ=15°θ=30°θ=0°θ=15°θ=30°
      Theoretical PIDE /%95.67095.62694.77394.75494.69293.658
      Actual PIDE /%94.83494.72994.40227.26726.87325.785
      Modified microstructure height /μm6.5256.5206.5042.7292.7062.639
      Modified PIDE /%95.67095.67095.65695.37095.37395.380

    • Table 2. Average polychromatic integral diffraction efficiency (PIDE) of the single layer DOEs within a certain range of incident angle%

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      Table 2. Average polychromatic integral diffraction efficiency (PIDE) of the single layer DOEs within a certain range of incident angle%

      PIDEZnSeZnS
      θmax=15°θmax=30°θmax=15°θmax=30°
      Minimum PIDE94.30991.96525.42020.335
      Minimum modified PIDE95.63194.87695.36595.259
      Comprehensive PIDE94.66794.01426.64624.874
      Modified comprehensive PIDE95.66495.52895.37095.351

    • Table 3. Average polychromatic integral diffraction efficiency of multilayer DOEs%

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      Table 3. Average polychromatic integral diffraction efficiency of multilayer DOEs%

      PIDEθ=0°θ=10°θ=20°
      Theoretical PIDE99.97299.79690.900
      Actual PIDE14.06016.01233.299
      Modified PIDE99.97299.92798.734
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    Liangliang Yang, Chenglin Liu, Fahua Shen, Yongbing Zhao. Diffraction Efficiency of Diffractive Optical Elements with Antireflection Coatings Within a Certain Incident Angle Range[J]. Acta Optica Sinica, 2021, 41(12): 1205002

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    Paper Information

    Category: Diffraction and Gratings

    Received: Dec. 7, 2020

    Accepted: Jan. 26, 2021

    Published Online: Jun. 2, 2021

    The Author Email: Yang Liangliang (yang_liangliang@163.com)

    DOI:10.3788/AOS202141.1205002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology