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Chinese Optics Letters, Volume. 20, Issue 7, 071301(2022)

LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang1, Jinhua Zhao1、*, Jinjun Gu1, Mingyang Bu1, Li Fan1, Shuang Li1, Xifeng Qin1, Yicun Yao2, Yingying Ren3, and Lei Wang4
Author Affiliations
  • 1School of Science, Shandong Jianzhu University, Jinan 250101, China
  • 2Shandong Key Laboratory of Optical Communication Science and Technology, School of Physical Science and Information Technology, Liaocheng University, Liaocheng 252059, China
  • 3Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
  • 4School of Physics, Shandong University, Jinan 250100, China
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    The article is cited by 8 article(s) from Web of Science.
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    Sumei Wang, Jinhua Zhao, Jinjun Gu, Mingyang Bu, Li Fan, Shuang Li, Xifeng Qin, Yicun Yao, Yingying Ren, Lei Wang, "LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing," Chin. Opt. Lett. 20, 071301 (2022)

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    Paper Information

    Category: Integrated Optics

    Received: Feb. 7, 2022

    Accepted: Apr. 18, 2022

    Published Online: May. 7, 2022

    The Author Email: Jinhua Zhao (zhaojinhua@sdjzu.edu.cn)

    DOI:10.3788/COL202220.071301

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology