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Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 239(2023)

Fabrication of LNOI Ridge Microstructure Based on Inductively Coupled Plasma Etching

WU Yuhang1,2, YANG Zhonghua3, MENG Xuefei3, SONG Zeqian3, LIU Wen1,2, LUO Wenbo2,3, and ZHANG Wanli2,3
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    WU Yuhang, YANG Zhonghua, MENG Xuefei, SONG Zeqian, LIU Wen, LUO Wenbo, ZHANG Wanli. Fabrication of LNOI Ridge Microstructure Based on Inductively Coupled Plasma Etching[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 239

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    Paper Information

    Received: Oct. 15, 2022

    Accepted: --

    Published Online: Nov. 29, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.02.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology