Spectroscopy and Spectral Analysis, Volume. 40, Issue 11, 3613(2020)

Plasma Emission Spectroscopy Analysis of Two-Way Microwave Coupled Reaction Cavity

Fang-hui LI*, Zhong-wen HE, Wei CAO, Hong-yang ZHAO, Qiu-ming FU, Chuan-bo XU, and Zhi-bin MA
Author Affiliations
  • School of Materials Science and Engineering, Key Laboratory of Plasma Chemical and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan 430205, China
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    Figures & Tables(5)
    Structure diagram of the reaction chamber
    Electric field distribution on the XZ plane in a quartz tube(a): 80 mm; (b): 83 mm; (c): 86 mm; (d): 89 mm
    Electric field distribution on the YZ plane in a quartz tube(a): L=53.2 mm, H=194 mm; (b): L=61.2 mm, H=194 mm;(c): L=61.2 mm, H=202 mm
    (a) Electric field isosurface simulation results in quartz tube at L=61.2 mm; (b) Influence of the distance of waveguides on Z-Axis plasma emission spectroscopy
    Plasma emission spectra of the reaction chambers with different gas pressures(a): Along the Z axis; (b): Along the X and Y axes
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    Fang-hui LI, Zhong-wen HE, Wei CAO, Hong-yang ZHAO, Qiu-ming FU, Chuan-bo XU, Zhi-bin MA. Plasma Emission Spectroscopy Analysis of Two-Way Microwave Coupled Reaction Cavity[J]. Spectroscopy and Spectral Analysis, 2020, 40(11): 3613

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    Paper Information

    Category: Research Articles

    Received: Sep. 22, 2019

    Accepted: --

    Published Online: Jun. 18, 2021

    The Author Email: Fang-hui LI (fanghuidwryx@outlook.com)

    DOI:10.3964/j.issn.1000-0593(2020)11-3613-04

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