Infrared and Laser Engineering, Volume. 51, Issue 4, 20210317(2022)
Correction method for edge deviation of line laser sensor
Figures & Tables(14)
Fig. 11. (a) Dimension measurement of 20 mm gauge block; (b) Dimen-sion measurement of 40 mm gauge block; (c) Dimension measurement of 60 mm gauge block
Fig. 12. Dimension measurement error before and after compensation
Table 1. Parameters of equipment
View tableView in ArticleTable 1. Parameters of equipment
Module Indicators and parameters Standard gauge block Limit deviation: ±0.6 μm Edge feature: Chamfer Line laser sensor Y axis accuracy: 0.045 mm Z axis range: −60-40 mm High-precision rotary table Resolution: 0.02° Positioning accuracy: 0.05°
Table 2. Dimension measurement results before and after error compensation (Unit: mm)
View tableView in ArticleTable 2. Dimension measurement results before and after error compensation (Unit: mm)
Size of gauge block No compensation ya=0.078 mm, K=2 ya=0.039 mm, K=5 Lmeas Δ Lmeas Δ Lmeas Δ 20 19.59 0.43 19.90 0.10 19.96 0.04 40 39.57 39.91 39.98 60 59.55 59.89 39.95
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Hongnan Zhao, Wensong Jiang, Li Yang, Zai Luo, Hongyang Li. Correction method for edge deviation of line laser sensor[J]. Infrared and Laser Engineering, 2022, 51(4): 20210317
Paper Information
Category: Photoelectric measurement
Received: May. 17, 2021
Accepted: --
Published Online: May. 18, 2022
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