Chinese Optics, Volume. 15, Issue 1, 90(2022)

Calibration of single optical wedge compensation test system error by computer generation hologram

Zhi-hua CAI1,2, Xiao-kun WANG1,2、*, Hai-xiang HU1,2、*, Qiang CHENG1,2, Ruo-qiu WANG1,2, and Hai-dong ZHANG1,2
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(16)
    (a) Single optical wedge test optical path. (b) Schematic of the test wavefront. w1, w2, w3, w4 are theoretical incident wavefront, actual incident wavefront, theoretical aspheric surface and actual aspheric surface, respectively.
    (a) Surface shape of the optical wedge A. (b) Surface shape of optical wedge B. (c) Transmitted wave aberration. (d) Transmission sphere system error. (e) Tap#1 non-null error. (f) Tap#2 non-null error. (g) Tap#3 non-null error.
    Calibration of the single optical wedge test path
    Structure of the CGH
    Main area of the CGH. (a) Design residual; (b) diffraction order energy level distribution; (c) diffraction pattern; (d) surface phase setting parameters
    Schematic of the single optical wedge deflection light path
    Alignment area. (a) Design residual; (b) diffraction order energy level distribution; (c) diffraction pattern
    Substrate error
    Convex spherical stitching test result (D = 197 mm) (a) Actual full-aperture surface; (b) sub-plane; (c) stitching test result; (d) the residual difference between the stitching test result and the full-aperture surface result
    (a) Calibration optical path diagram of optical wedge compensator. (b) CGH and interferometer aligned on the optical path. (c) Insertion of the optical wedge compensator
    Calibration results for the test path system error. (a) CGH alignment result by Tap#2. (b) Test path system error by Tap#2. (c) CGH alignment result by Tap#3. (d) Test path system error by Tap#3
    • Table 1. Basic parameters

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      Table 1. Basic parameters

      ItemTap#1Tap#2Tap#3
      Sub-apertureplanningNumber1/218/2112/21
      Off-axis/mm0145175
      Subaperture/mm118114116
      Departure/μm0.7419.228.5
      Need compensation×
      Optical wedgestructureparametersDiameter /mm150150
      Centre thickness /mm2020
      Tilt/(°)3.20.77
      Wedge/(°)6.36.3
      MaterialF_SilicaF_Silica
    • Table 2. Adjustment tolerance analysis of the optical wedge compensator

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      Table 2. Adjustment tolerance analysis of the optical wedge compensator

      Wedge-interferometer dist./mmWedge-mirror. dist./mmx-tilt /(°) y-tilt /(°) Eccentric eccentricity/mmRMS
      Test system 0.150.150.0050.0139.21×10−3λ
      Calibration system 0.050.050.00150.0010.058.35×10−3λ
    • Table 3. CGH fringe contrast

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      Table 3. CGH fringe contrast

      Diffraction orderAmplitude CGHPhase CGH
      073.05%
      ±193.09%61.08%
      ±378.92%99.97%
      ±554.01%87.29%
    • Table 4. CGH error

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      Table 4. CGH error

      Error typeValue
      design residual1.77×10−5λ
      coding error9.00×10−4λ
      substrate error3.00×10−3λ
      characterization distortion1.57×10−4λ
      RMS3.10×10−3λ
    • Table 5. Single optical wedge compensation test accuracy after CGH calibration (nm)

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      Table 5. Single optical wedge compensation test accuracy after CGH calibration (nm)

      ErrorValue
      Measuring random error2.5
      CGH calibration test optical path system error1.98
      Accuracy of stitching algorithm1.26
      RMS3.43
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    Zhi-hua CAI, Xiao-kun WANG, Hai-xiang HU, Qiang CHENG, Ruo-qiu WANG, Hai-dong ZHANG. Calibration of single optical wedge compensation test system error by computer generation hologram[J]. Chinese Optics, 2022, 15(1): 90

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    Paper Information

    Category: Original Article

    Received: Mar. 2, 2021

    Accepted: --

    Published Online: Jul. 27, 2022

    The Author Email: Xiao-kun WANG (jimwxk@sohu.com), Hai-xiang HU (hhx@ciomp.ac.cn)

    DOI:10.37188/CO.EN.2021-0004

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