Opto-Electronic Engineering, Volume. 51, Issue 8, 240089(2024)

Applications of vector vortex beams in laser micro-/nanomachining

Chen Xie1,2、* and Tongyan Liu1
Author Affiliations
  • 1Ultrafast Laser Laboratory, College of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronic Information Science and Technology Ministry of Education, Tianjin University, Tianjin 300072, China
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    In the past two decades, numerous significant advances have been achieved in the realm of the vector beams. Considering numerous published reviews already covering diverse topics in terms of generating and/or manipulating unprecedented vector beams, we summarize the typical applications of vector vortex beams in the topics of laser micro-nano processing for material modification, subtractive and additive manufactures. This paper reviews part of the critical advances in fabricating micro-nano structures on the surface and inside the materials, optical information storage and rapid fabrication of microstructures with the stereolithography based-on vector vortex beams. Particular cares are focused on the principles and technologies in applications of patterned laser-induced periodic surface structures and rapid two-photon polymerization of three-dimensional microstructures based on customized vector vortex beams. Finally, we summarize the advantages and challenges of vector vortex beams in laser micro-nano processing, and we also anticipate that more vector light fields will enable more complex applications in the future.

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    Chen Xie, Tongyan Liu. Applications of vector vortex beams in laser micro-/nanomachining[J]. Opto-Electronic Engineering, 2024, 51(8): 240089

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    Paper Information

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    Received: Apr. 17, 2024

    Accepted: Aug. 2, 2024

    Published Online: Nov. 12, 2024

    The Author Email: Xie Chen (谢辰)

    DOI:10.12086/oee.2024.240089

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