Process Optimization and Experimental Research on Surface Roughness of Single-Crystal Germanium for Ultra-Precision Cutting

Fig. 3. Experimental equipment and results. (a) Taylor Hobson PGI 1240 contacting mechanical profiler; (b) schematic diagram of measurement direction of single-crystal germanium wafer

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Fig. 5. Surface roughness values of single-crystal germanium sheets in all directions

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Fig. 6. Main effect diagrams of cutting parameters affecting surface roughness R_a value. (a) Bright area; (b) dark area

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Fig. 7. Surface roughness R_avalues under optimal cutting parameters

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Fig. 8. Topography under optimal cutting parameters. (a) Surface topography; (b) chip topography

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Table 1. Machining parameters of turning experiment
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Table 1. Machining parameters of turning experiment
Factors Code Level
1 2 3 4
Environment
temperature /℃
20
Spindle speed n /（r·min^-1） A 1500 2200 3000 3800
Feed rate f /（mm·min^-1） B 2 8 14 20
Cutting depth a_p /μm C 5 10 15 20

Table 2. Orthogonal experimental scheme

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Table 2. Orthogonal experimental scheme

No.	Spindle speed f /（r·min^-1）	Feed rate n /（mm·min^-1）	Cutting depth a_p /μm	Dark area R_a /nm	Bright area R_a /nm
1	1500	2	5	5.03	6.90
2	1500	8	10	4.83	8.03
3	1500	14	15	10.53	12.57
4	1500	20	20	15.50	18.07
5	2200	2	10	4.57	7.23
6	2200	8	5	5.80	8.60
7	2200	14	20	10.33	14.00
8	2200	20	15	14.83	17.87
9	3000	2	15	4.83	5.53
10	3000	8	20	4.27	4.93
11	3000	14	5	6.90	9.63
12	3000	20	10	11.17	13.10
13	3800	2	20	4.90	6.23
14	3800	8	15	4.30	4.50
15	3800	14	10	5.97	8.90
16	3800	20	5	9.33	11.47

Table 3. Analysis of variance table of surface roughness R_a of single-crystal germanium in bright area

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Table 3. Analysis of variance table of surface roughness R_a of single-crystal germanium in bright area

Parameters	DF	SS	MS	F value	P value	Contribution /%
Spindle speed f /（r·min^-1）	3	53.562	17.854	19.910	0.002	18.47
Feed rate n /（mm·min^-1）	3	209.432	69.811	77.830	0	75.06
Cutting depth a_p /μm	3	7.056	2.352	2.620	0.145	1.58
Error	6	5.382	0.897			4.88
Total	15	275.431				100.00

Table 4. Analysis of variance table of surface roughness R_a of single-crystal germanium in dark area

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Table 4. Analysis of variance table of surface roughness R_a of single-crystal germanium in dark area

Parameters	DF	SS	MS	F value	P value	Contribution /%
Spindle speed f /（r·min^-1）	3	25.326	8.442	16.94	0.002	11.18
Feed rate n /（mm·min^-1）	3	168.995	56.332	113.05	0	78.57
Cutting depth a_p /μm	3	15.867	5.289	10.61	0.008	6.74
Error	6	2.990	0.4983			3.51
Total	15	213.178				100.00

Table 5. Range analysis table of surface roughness R_a in bright area

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Table 5. Range analysis table of surface roughness R_a in bright area

Level	Spindle speed（A） /（r·min^-1）	Feed rate（B）/（mm·min^-1）	Cutting depth（C）/μm
Rank	2	1	3
1	11.392	6.475	9.150
2	11.925	6.517	9.317
3	8.300	11.275	10.117
4	7.775	15.125	10.808
Max-min（R）	4.150	8.650	1.658

Table 6. Range analysis table of surface roughness R_a in dark area
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Table 6. Range analysis table of surface roughness R_a in dark area
Level Spindle speed（A） /（r·min^-1） Feed rate（B）/（mm·min^-1） Cutting depth（C）/μm
Rank 2 1 3
1 8.975 4.833 6.767
2 8.883 4.800 6.633
3 6.792 8.433 8.625
4 6.125 12.708 8.750
Max-min（R） 2.850 7.908 2.117

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Bohan Cheng, Xiaojing Yang, Yanjun Guo, Tong Yao, Jie Kang. Process Optimization and Experimental Research on Surface Roughness of Single-Crystal Germanium for Ultra-Precision Cutting[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1916001

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Paper Information

Category: Materials

Received: Apr. 26, 2022

Accepted: Jun. 14, 2022

Published Online: Sep. 25, 2023

The Author Email: Xiaojing Yang (xjyang@vip.sina.com)

DOI:10.3788/LOP221420

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Machining parameters of turning experiment

Table 1. Machining parameters of turning experiment

Table 2. Orthogonal experimental scheme

Table 2. Orthogonal experimental scheme

Table 3. Analysis of variance table of surface roughness Ra of single-crystal germanium in bright area

Table 3. Analysis of variance table of surface roughness Ra of single-crystal germanium in bright area

Table 4. Analysis of variance table of surface roughness Ra of single-crystal germanium in dark area

Table 4. Analysis of variance table of surface roughness Ra of single-crystal germanium in dark area

Table 5. Range analysis table of surface roughness Ra in bright area

Table 5. Range analysis table of surface roughness Ra in bright area

Table 6. Range analysis table of surface roughness Ra in dark area

Table 6. Range analysis table of surface roughness Ra in dark area

Table 3. Analysis of variance table of surface roughness R_a of single-crystal germanium in bright area

Table 3. Analysis of variance table of surface roughness R_a of single-crystal germanium in bright area

Table 4. Analysis of variance table of surface roughness R_a of single-crystal germanium in dark area

Table 4. Analysis of variance table of surface roughness R_a of single-crystal germanium in dark area

Table 5. Range analysis table of surface roughness R_a in bright area

Table 5. Range analysis table of surface roughness R_a in bright area

Table 6. Range analysis table of surface roughness R_a in dark area

Table 6. Range analysis table of surface roughness R_a in dark area