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Collection Of theses on high power laser and plasma physics, Volume. 3, Issue 1, 85(2005)

Design and Control of an Ultraprecision Stage Used in Grating TiIing

[in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800, China
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    [in Chinese], [in Chinese], [in Chinese]. Design and Control of an Ultraprecision Stage Used in Grating TiIing[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 85

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    Paper Information

    Received: --

    Accepted: --

    Published Online: Jun. 1, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology