Theory and experiment haw demonstrated that the coherent addition of multiple small gratings to form a larger grating is viable. an approach referred to as grating tiling. and the key technology of which is to control the relative position and orientation of each grating with high precision. According to the main factors that affect the performance of the tiled grating. We develop a five-DOF ultraprecision stage for the tiled grating experiment. The design and control of the mechanism is discussed and part of experiment results is presented.