Fig. 1. Schematic diagram of tunable-focus liquid microlens array. (a) Before the water injection; (b) After the water injection

Fig. 2. Optical microscope image of the silicon micro-holes array

Fig. 3. Flow chart of microlens array fabrication

Fig. 4. The picture of assembled tunable-focus liquid microlens array

Fig. 5. Schematic diagram of focal length measurement

Fig. 6. Relationship between water injection volume and focal distance

Fig. 7. Laser spot focusing diagram of different water injection volume

Fig. 8. Imaging experimental diagram

Fig. 9. (a)-(h) Water injection volume 0.33，0.99，1.32，1.65，1.98，2.31，2.64 μL imaging diagram

Fig. 10. Principle diagram of laser beam homogenization and shaping

Fig. 11. Experimental diagram

Fig. 12. (a) Simulation result when is 6.5 mm; (b) Experimental the result when is 6.5 mm (a) 为6.5 mm时仿真结果；(b) 为6.5 mm时实验结果

Fig. 12. [in Chinese]

Fig. 13. (a) Simulation result when is 6.3 mm; (b) Experimental result when is 6.3 mm (a) 为6.3 mm时仿真结果；(b) 为6.3 mm时实验结果

Fig. 14. (a), (c) Simulation result graphics of the is 6.1 mm and 6.2 mm respectively; (b), (d) Experimental result graphics of the is 6.1 mm and 6.2 mm respectively (a)、(c) 分别为6.1 mm与6.2 mm时仿真结果；(b)、(d) 分别为6.1 mm与6.2 mm时实验结果