Opto-Electronic Engineering, Volume. 40, Issue 2, 93(2013)
Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform
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LIN Yongben, LI Yongtao, LI Chaobo, XIA Yang, WANG Minggang, CHEN Yan. Research of Vacuum Micro-pressure Controlling Based on PSS Etching Platform[J]. Opto-Electronic Engineering, 2013, 40(2): 93
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Received: Aug. 20, 2012
Accepted: --
Published Online: Mar. 5, 2013
The Author Email: Yongben LIN (linyongben@ime.ac.cn)
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