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Acta Optica Sinica, Volume. 42, Issue 19, 1936001(2022)

Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation

Jinyu Li1, Gaoyuan Yang1, Haofeng Zang2, Huoyao Chen1, Tonglin Huo1, Hongjun Zhou1, Yonghua Lu2, Ying Liu1、*, Yilin Hong1, and Shaojun Fu1
Author Affiliations
  • 1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, Anhui , China
  • 2Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, Anhui , China
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    Schematic diagram of EUV scatterometry

    Fig. 1. Schematic diagram of EUV scatterometry

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    AFM results and corresponding Fourier transform images of samples A, B, C, and D. (a)-(d) AFM results with area of 25 μm2; (e)-(h) Fourier transform images corresponding to Figs. 2(a)-(d)

    Fig. 2. AFM results and corresponding Fourier transform images of samples A, B, C, and D. (a)-(d) AFM results with area of 25 μm2; (e)-(h) Fourier transform images corresponding to Figs. 2(a)-(d)

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    Measured EUV scattering results of samples A-D. (a) In-plane mode; (b) conical mode

    Fig. 3. Measured EUV scattering results of samples A-D. (a) In-plane mode; (b) conical mode

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    Jinyu Li, Gaoyuan Yang, Haofeng Zang, Huoyao Chen, Tonglin Huo, Hongjun Zhou, Yonghua Lu, Ying Liu, Yilin Hong, Shaojun Fu. Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation[J]. Acta Optica Sinica, 2022, 42(19): 1936001

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    Paper Information

    Category: Letters

    Received: Jan. 26, 2022

    Accepted: Apr. 5, 2022

    Published Online: Oct. 18, 2022

    The Author Email: Liu Ying (liuychch@ustc.edu.cn)

    DOI:10.3788/AOS202242.1936001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology