Acta Optica Sinica, Volume. 35, Issue 2, 212005(2015)
Nano Focusing Method Based on Moire Fringe Phase Analysis
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Feng Jinhua, Hu Song, Li Yanli, He Yu. Nano Focusing Method Based on Moire Fringe Phase Analysis[J]. Acta Optica Sinica, 2015, 35(2): 212005
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jul. 20, 2014
Accepted: --
Published Online: Jan. 9, 2015
The Author Email: Feng Jinhua (girlfjh@163.com)
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