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Chinese Optics Letters, Volume. 22, Issue 8, 081201(2024)

Common-path illumination in ESPI: enhancing sensitivity for measuring specular deformation

Peizheng Yan1,2, Xiangwei Liu1,2, Xinda Zhou3, Rongsheng Ba3, Hanxuan Zhou1,2, Yonghong Wang1,2、*, and Jie Li3、**
Author Affiliations
  • 1School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
  • 2Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei 230009, China
  • 3Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
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    [1] Y. W. Zhu, Z. K. Chen, W. J. Zhou et al. Photoacoustic speckle pattern interferometry for detecting cracks of different sizes. Opt. Express, 31, 40328(2023).

    [2] M. Z. Yu, C. Jia, X. G. Han et al. Ultra-high-sensitivity micro-accelerometer achieved by pure axial deformation of piezoresistive beams. Meas. Sci. Technol., 34, 125159(2023).

    [3] S. J. Li, Y. T. Huang, F. Y. Zhao et al. Establishment and analysis of feasibility evaluation system and ultra-precision manufacturing technology for small aperture free-form surface optical element. Int. J. Adv. Manuf. Technol., 127, 2299(2023).

    [4] X. Q. Cui, H. B. Wang, M. G. Zhao et al. The measurement of plasma-facing materials’ topography variation by means of temporal phase-shifting speckle interferometry technique. Nucl. Mater. Energy, 12, 1236(2017).

    [5] S. Q. Liu, F. H. Yu, R. Hong et al. Advances in phase-sensitive optical time-domain reflectometry. Opto-Electron. Adv., 5, 200078(2022).

    [6] A. Ettemeyer. Combination of 3-D deformation and shape measurement by electronic speckle-pattern interferometry for quantitative strain-stress analysis. Opt. Eng., 39, 212(2000).

    [7] M. P. Georges, C. Thizy, F. Languy et al. An overview of interferometric metrology and NDT techniques and applications for the aerospace industry. Proc. SPIE, 9960, 996007(2016).

    [8] E. H. Nosekabel, T. Ernst, W. Haefker. Measurement of the thermal deformation of a highly stable antenna with pulse ESPI. Proc. SPIE, 6616, 66162X(2007).

    [9] R. S. Hansen. A compact ESPI system for displacement measurements of specular reflecting or optical rough surfaces. Opt. Lasers Eng., 41, 73(2004).

    [10] C. Joenathan, A. Sohmer, L. Burkle. Increased sensitivity to in-plane displacements in electronic speckle pattern interferometry. Appl. Opt., 34, 2880(1995).

    [11] A. Sohmer, C. Joenathan. Twofold increase in sensitivity with a dual-beam illumination arrangement for electronic speckle pattern interferometry. Opt. Eng., 35, 1943(1996).

    [12] B. Bhaduri, M. P. Kothiyal, N. K. Mohan. Digital speckle pattern interferometry (DSPI) with increased sensitivity: use of spatial phase shifting. Opt. Commun., 272, 9(2007).

    [13] B. Bhaduri, N. K. Mohan, M. P. Kothiyal et al. Use of spatial phase shifting technique in digital speckle pattern interferometry (DSPI) and digital shearography (DS). Opt. Express, 14, 11598(2006).

    [14] R. S. Hansen. Deformation measurements of specularly reflecting objects using holographic interferometry with diffuse illumination. Opt. Lasers Eng., 28, 259(1997).

    [15] Q. Kemao. Applications of windowed Fourier fringe analysis in optical measurement: a review. Opt. Lasers Eng., 66, 67(2015).

    [16] P. Z. Yan, Y. Wang, F. Y. Sun et al. Shearography for non-destructive testing of specular reflecting objects using scattered light illumination. Opt. Laser Technol., 112, 452(2019).

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    Peizheng Yan, Xiangwei Liu, Xinda Zhou, Rongsheng Ba, Hanxuan Zhou, Yonghong Wang, Jie Li, "Common-path illumination in ESPI: enhancing sensitivity for measuring specular deformation," Chin. Opt. Lett. 22, 081201 (2024)

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    Paper Information

    Category: Instrumentation, Measurement, and Optical Sensing

    Received: Mar. 26, 2024

    Accepted: Apr. 16, 2024

    Posted: Apr. 17, 2024

    Published Online: Aug. 21, 2024

    The Author Email: Yonghong Wang (yhwang@hfut.edu.cn), Jie Li (ljieleej@163.com)

    DOI:10.3788/COL202422.081201

    CSTR:32184.14.COL202422.081201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology