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Chinese Journal of Lasers, Volume. 38, Issue 10, 1016001(2011)

Fabrication of Electrostatically Actuated MEMS Deformable Mirror with Continuous Surface

Hu Fangrong1、*, Ma Wenying2, and Wang Weimin3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Hu Fangrong, Ma Wenying, Wang Weimin. Fabrication of Electrostatically Actuated MEMS Deformable Mirror with Continuous Surface[J]. Chinese Journal of Lasers, 2011, 38(10): 1016001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 17, 2011

    Accepted: --

    Published Online: Sep. 27, 2011

    The Author Email: Fangrong Hu (hufangrong@sina.com)

    DOI:10.3788/cjl201138.1016001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology