Acta Optica Sinica, Volume. 31, Issue 1, 112012(2011)

Research of Errors Analysis and Material Removal Stability in Fluid Jet Polishing

Shi Chunyan1,2、*, Yuan Jiahu1, Wu Fan1, and Wan Yongjian1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(10)

    [1] [1] O.W. Fhnle, Hedeser van Brug, H. J.Frankena. Fluid jet polishing of optical surfaces [J]. Appl. Opt., 1998, 37(28): 6671~6673

    [2] [2] Silvia M. Booij, Hedser van Brug. Nanometer deep shaping with fluid jet polishing [J]. Opt. Engng., 2002, 41(8): 1926~1931

    [3] [3] O. W. Fhnle, Fluid jet polishing: removal process analysis, optical fabrication and testing [C]. SPIE, 1999, 3739: 68~77

    [4] [4] Shi Chunyan, Yuan Jiahu, Wu Fan et al.. Influence analysis of impact angle on material removal profile in fluid jet polishing [J]. Acta Optica Sinica, 2010, 30(3): 513~517

    [6] [6] S. M. Booij, H. van Brug, M. Singh et al.. Nanometer accurate shaping with fluid jet polishing [C]. SPIE, 2001, 4451: 222~232

    [8] [8] Shi Chunyan, Yuan Jiahu, Wu Fan et al.. Study of abrasive particles discrete system in fluid jet polishing[J]. Infared and Laser Engineering, 2009, 38(s): 73~76

    CLP Journals

    [1] Lü Liang, Ma Ping, Zhu Heng, Huang Jinyong, Wang Gang. Effect of Material Removal Function on Surface Shape Error Correction in Fluid Jet Polishing[J]. Chinese Journal of Lasers, 2016, 43(4): 416003

    [2] Bai Yang, Zhang Feng, Deng Weijie, Li Longxiang, Zheng Ligong, Zhang Xuejun. Preparation of Magnetorheological Polishing Fluid and Its Polishing Stability[J]. Acta Optica Sinica, 2014, 34(4): 416001

    [3] Shi Chunyan, Yuan Jiahu, Wu Fan, Wan Yongjian. Analysis of Polishing Errors by Tool Paths and Optimization of Tool Paths[J]. Acta Optica Sinica, 2011, 31(8): 822003

    [4] Zhang Jian, Dai Lei, Wang Fei, Wang Lipeng. Restraint of Mid-Spatial-Frequency Error Aspheric Surface by Small-Tool Adaptive Polishing[J]. Acta Optica Sinica, 2013, 33(8): 822002

    [5] Ma Zhanlong, Sui Yongxin. Large Optical Surface Error Figuring by Ion Beam[J]. Acta Optica Sinica, 2014, 34(1): 122001

    [6] Li Longxiang, Deng Weijie, Zhang Binzhi, Bai Yang, Zheng Ligong, Zhang Xuejun. Dwell Time Algorithm for Large Aperture Optical Element in Magnetorheological Finishing[J]. Acta Optica Sinica, 2014, 34(5): 522001

    [7] Ma Yinghui, Jiang Fang, Xu Xuefeng. Study on Numerical Calculation Models for Solid-Liquid Two-Phase Impinging Jet with Nanoparticles[J]. Laser & Optoelectronics Progress, 2015, 52(3): 31601

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    Shi Chunyan, Yuan Jiahu, Wu Fan, Wan Yongjian. Research of Errors Analysis and Material Removal Stability in Fluid Jet Polishing[J]. Acta Optica Sinica, 2011, 31(1): 112012

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 18, 2010

    Accepted: --

    Published Online: Dec. 31, 2010

    The Author Email: Chunyan Shi (yancshi@163.com)

    DOI:10.3788/aos201131.0112012

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