Optics and Precision Engineering, Volume. 20, Issue 7, 1434(2012)

Automatic alignment of double paths in electron pumped excimer laser amplifier

WANG Da-hui*, ZHAO Xue-qing, ZHANG Yong-sheng, SUN Yu-wei, and ZHAO Jun
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    [1] WANG Da-hui, QIAN Hang, ZHAO Xue-qing, MA Lian-ying, ZHANG Yong-sheng, SHAO Bi-bo, FENG Gang, YI Ai-ping, ZHAO Jun. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging[J]. Optics and Precision Engineering, 2015, 23(4): 949

    [2] WANG Wei, LI Dong-jian, LI Hong-guang, WANG Zheng-zhou, CAO Shi-kang. Irregular image adaptive focusing system for diffraction grating[J]. Optics and Precision Engineering, 2014, 22(4): 822

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    WANG Da-hui, ZHAO Xue-qing, ZHANG Yong-sheng, SUN Yu-wei, ZHAO Jun. Automatic alignment of double paths in electron pumped excimer laser amplifier[J]. Optics and Precision Engineering, 2012, 20(7): 1434

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    Paper Information

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    Received: Jan. 16, 2012

    Accepted: --

    Published Online: Aug. 9, 2012

    The Author Email: WANG Da-hui (chsslw@163.com)

    DOI:10.3788/ope.20122007.1434

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