Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis

Bing Li; Yao Che; Hui Xu; Zhigang Zhang; Hong Zhou

doi:10.3788/LOP231551

Laser & Optoelectronics Progress, Volume. 60, Issue 23, 2300004(2023)

Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis

Bing Li¹, Yao Che², Hui Xu¹, Zhigang Zhang¹, and Hong Zhou^3,4、*

¹Exchange & Development & Service Center of Science & Technology Talents of The Ministry of Science & Technology, Beijing 100045, China

²Institute of Scientific and Technical Information of China,Beijing 100038, China

³Wuhan Document and Information Center, Chinese Academy of Sciences, Wuhan 430071, Hubei, China

⁴Department of Information Resources Management, School of Economics and Management, University of Chinese Academy of Sciences, Beijing 100191, China

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Bing Li, Yao Che, Hui Xu, Zhigang Zhang, Hong Zhou. Lithography Technical Science Knowledge Map and Multidimensional Theme Analysis[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2300004

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Paper Information

Category: Reviews

Received: Jun. 19, 2023

Accepted: Sep. 6, 2023

Published Online: Dec. 4, 2023

The Author Email: Zhou Hong (zhouh@mail.whlib.ac.cn)

DOI:10.3788/LOP231551

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology