Chinese Optics Letters, Volume. 11, Issue 7, 071201(2013)

Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu, Xiaogang Sun, and Meisheng Luan
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CLP Journals

[1] Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He, "Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape," Chin. Opt. Lett. 16, 031201 (2018)

[2] Xingxing Liu, Shaowei Wang, Hui Xia, Xutao Zhang, Ruonan Ji, Tianxin Li, Wei Lu, "Interference-aided spectrum-fitting method for accurate film thickness determination," Chin. Opt. Lett. 14, 081203 (2016)

[3] Lei Zhang, Jingmin Dai, Zhe Yin, "Portable infrared spectral radiance measurement apparatus based on PbSe detectors," Chin. Opt. Lett. 13, 063001 (2015)

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Chao Qiu, Xiaogang Sun, Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201 (2013)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Jan. 7, 2013

Accepted: Apr. 12, 2013

Published Online: Jul. 4, 2013

The Author Email:

DOI:10.3788/col201311.071201

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