Chinese Optics Letters, Volume. 11, Issue 7, 071201(2013)
Determining polymer film thickness during manufacturing with broadband transmission
A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert–Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 \mu m for polymer films with less than 100-\mm m thickness.
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Chao Qiu, Xiaogang Sun, Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201 (2013)
Category: Instrumentation, measurement, and metrology
Received: Jan. 7, 2013
Accepted: Apr. 12, 2013
Published Online: Jul. 4, 2013
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