Chinese Optics Letters, Volume. 11, Issue 7, 071201(2013)

Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu, Xiaogang Sun, and Meisheng Luan

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert–Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 \mu m for polymer films with less than 100-\mm m thickness.

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Chao Qiu, Xiaogang Sun, Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201 (2013)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Jan. 7, 2013

Accepted: Apr. 12, 2013

Published Online: Jul. 4, 2013

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DOI:10.3788/col201311.071201

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