Chinese Journal of Liquid Crystals and Displays, Volume. 38, Issue 8, 1047(2023)
Influence of black photo spacer material for TFT-LCD on mark reading in exposure process
Fig. 4. Photographs of Mark reading during exposure of A BPS with different thickness. (a) 4.0 μm; (b) 4.5 μm.
Fig. 8. Morphology of B BPS. (a) Top-view of optical micrograph; (b) Cross-section of SEM image.
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Ji LI, Xia ZHANG, Chang LIAO, Chung-ching HSIEH, Yong-ming YIN, Hong MENG. Influence of black photo spacer material for TFT-LCD on mark reading in exposure process[J]. Chinese Journal of Liquid Crystals and Displays, 2023, 38(8): 1047
Category: Research Articles
Received: Feb. 28, 2023
Accepted: --
Published Online: Oct. 9, 2023
The Author Email: Yong-ming YIN (yinyongming@smbu.edu.cn), Hong MENG (menghong@pku.edu.cn)