Journal of Semiconductors, Volume. 46, Issue 6, 062303(2025)

Complementary inverter based on ZnO thin-film transistors

Dunan Hu1, Genyuan Yu2、*, Ruqi Yang1, Honglie Lin1, and Jianguo Lu1、**
Author Affiliations
  • 1State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310058, China
  • 2Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
  • show less
    Figures & Tables(5)
    (Color Online) (a) Schematic cross section and (b) equivalent circuit diagram of complementary inverters based on p- and n-type ZnO TFTs.
    (Color Online) (a) Output characteristics of the n-ZnO:Al TFT with (b) corresponding transfer curve at VDS = 40 V, (c) output characteristics of the p-ZnO:(Li,N) TFT with (d) corresponding transfer curve at VDS = −40 V.
    (Color Online) (a) Static voltage transfer characteristics and (b) voltage gains at different supply voltages for a complementary inverter based on p- and n-type ZnO TFTs.
    (Color Online) (a) Static voltage transfer characteristics and (b) voltage gains at supply voltages of 30 V for another complementary inverter measured directly after device fabrication; (c) static voltage transfer characteristics and (d) voltage gains at supply voltages of 30 V for the complementary inverter measured after 30 days for being stored in dry air.
    • Table 1. Electrical properties of chosen p-ZnO:(Li,N) and n-ZnO:Al thin films.

      View table
      View in Article

      Table 1. Electrical properties of chosen p-ZnO:(Li,N) and n-ZnO:Al thin films.

      SamplesResistivity (Ω∙cm)Hall mobility (cm2/(V∙s))Carrier concentration (cm−3)Type
      ZnO:(Li,N)36.551.351.26 × 1017p-type
      ZnO:Al1.7111.83.09 × 1017n-type
    Tools

    Get Citation

    Copy Citation Text

    Dunan Hu, Genyuan Yu, Ruqi Yang, Honglie Lin, Jianguo Lu. Complementary inverter based on ZnO thin-film transistors[J]. Journal of Semiconductors, 2025, 46(6): 062303

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Research Articles

    Received: Sep. 21, 2024

    Accepted: --

    Published Online: Jun. 30, 2025

    The Author Email: Genyuan Yu (GYYu), Jianguo Lu (JGLu)

    DOI:10.1088/1674-4926/24090040

    Topics