Acta Optica Sinica, Volume. 30, Issue 8, 2468(2010)
Determination of Optical Constants and Thickness of Diamond-Like Carbon Films by a Multiple Sample Method
[2] [2] Y.Hishikawa,N.Nakamura,S.Tsuda et al..Interference-free determination of the optical-absorption coefficient and the optical gap of amorphous-silicon thin-films[J].Jpn.J.Appl.Phys.,1991,30(5):1008-1014
[3] [3] Tang Jinfa,Gu Peifu,Li Xu et al..Modern Optical Thin Film Technology[M].Hangzhou:Zhejiang University Press,2006
[5] [5] Zhong Disheng,Wang Luchuan,Yu Yingzhi.Optical constants measurement of thin film by spectrophotometry[J].J.Liaoning University(Natural Sciences Edition),1996,23(2):1-13
[6] [6] C.Xue,K.Yi,C.Wei et al..Optical constants of DUV/UV fluoride thin films[J].Chin.Opt.Lett.,2009,7(5):449-451
[7] [7] Chen Yanping,Yu Feihong.Test methods for film thickness and optical constants[J].Optical Instruments,2006,28(6):84-88
[9] [9] E.D.Palik.Handbook of Optical Constants of Solids[M].San Diego:Academic Press,1985.89-110
[10] [10] J.N.Hilfiker,C.L.Bungay,R.A.Synowicki et al..Progress in spectroscopic ellipsometry:applications from vacuum ultraviolet to infrared[J].J.Vac.Sci.Technol.A,2003,21(4):1103-1108
[11] [11] H.Fujiwara.Spectroscopic Ellipsometry:Principles and Applications[M].Chichester:John Wiley & Sons,2007.81-87
[13] [13] B.Johs,R.H.French,F.D.Kalk et al..Optical analysis of complex multilayer structures using multiple data types[C].SPIE,1994,2253:1098-1106
[14] [14] W.A.McGahan,B.Johs,J.A.Woollam.Techniques for ellipsometric measurement of the thickness and optical constants of thin absorbing films[J].Thin Solid Films,1993,234(1-2):443-446
[15] [15] G.K.Pribil,B.Johs,N.J.Ianno.Dielectric function of thin metal films by combined in situ transmission ellipsometry and intensity measurements[J].Thin Solid Films,2004,455-456:443-449
[16] [16] D.E.Aspnes,J.B.Theeten.Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry[J].Phys.Rev.B,1979,20(8):3292-3302
[17] [17] A.V.Tikhonravov,M.K.Trubetskov,A.A.Tikhonravov et al..Effects of interface roughness on the spectral properties of thin films and multilayers[J].Appl.Opt.,2003,42(25):5140-5148
[18] [18] D.Franta,L.Zajickova,I.Ohlidal et al..Optical characterization of diamond-like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry[J].Diam.Relat.Mater.,2002,11(1):105-117
[19] [19] H.G.Tompkins,S.Tasic.Synergism of transmission measurements with spectroscopic ellipsometry measurements in the analysis of a nearly opaque bimetal film stack on glass[J].J.Vac.Sci.Technol.A,2000,18(3):946-950
[21] [21] X.Sun,R.Hong,H.Hou et al..Optical properties and structures of silver thin films deposited by magnetron sputtering with different thicknesses[J].Chin.Opt.Lett.,2006,4(6):366-369
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Zhou Yi, Wang Aiying. Determination of Optical Constants and Thickness of Diamond-Like Carbon Films by a Multiple Sample Method[J]. Acta Optica Sinica, 2010, 30(8): 2468
Category: Thin Films
Received: Sep. 3, 2009
Accepted: --
Published Online: Aug. 13, 2010
The Author Email: Yi Zhou (zhouyi@nimte.ac.cn)