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Acta Optica Sinica, Volume. 23, Issue 11, 1362(2003)

Analysis of the Reflectivity of Mo/Si Multilayer Film for Sof t X-Ray

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of the Reflectivity of Mo/Si Multilayer Film for Sof t X-Ray[J]. Acta Optica Sinica, 2003, 23(11): 1362

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    Paper Information

    Category: Thin Films

    Received: Sep. 3, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (wang4833@sohu.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology