Journal of Semiconductors, Volume. 40, Issue 10, 101301(2019)
III–V ternary nanowires on Si substrates: growth, characterization and device applications
Fig. 1. (a)–(c) Scanning electron microscopy (SEM) images of InAsSb/GaSb core/shell NWs grown via MOCVD following SAG mode. The arrays of the grown NWs have a high level of homogeneity. NWs were grown with different Sb compositions, as indicated in each image. (Reprinted with permission from Ref. [
Fig. 2. (Color online) (a) Droplet is deposited on the Si substrate. (b) Elements are supplied in the reactor. The adatoms are alloyed with the liquid droplet and, after supersaturation, a monolayer is formed covering the liquid/solid interface. (c) The continuous supply of elements leads to the elongation of the NW. The adatoms reach the droplet either via direct impingement or after diffusion on the substrate and the NW sidewalls. (d) After the supply of elements is terminated, the axial growth stops.
Fig. 3. (Color online) (a) Top view and (b) front view schematic representations respectively for a GaAs NW cladded with a 20 nm thick AlInAs shell. The strain that is induced by the lattice mismatch between the core and the shell causes a severe bending of the NW. The convex side is more appropriate for adatom accommodation, further increasing this phenomenon. (Reprinted with permission from Ref. [
Fig. 4. (Color online) (a) SEM image of GaAsP NWs grown under V/III ratio of 50. Uniformity and vertically aligned NWs are observed. (b) SEM image of GaAsP NWs grown under V/III ratio of 75. The growth rate is reduced due to shrinkage of the droplet, causing a severe tapering in the NWs. (c) SEM image of GaAsP NWs grown under V/III ratio of 100. Large group V flux rapidly consumes the droplets and no VLS growth takes place. (d) Transmission Electron Microscopy (TEM) image of the overall and section views of a NW grown under V/III ratio of 50. In the middle of the structure, no defects are observed and the crystal adopts a pure ZB phase. The only defects are located at the top and bottom parts of the NW. The SAED pattern, a higher magnification on the droplet and a higher magnification of the part indicated by the white arrows are given in the insets. (e) A TEM image of a NW grown under V/III ratio of 75. Multiple defects are viewed in the image due to the increased flux of group V elements. The defects appear as regions of different brightness and three typical examples are shown with black arrows. (
Fig. 5. (Color online) (a) TEM image of a GaAs QD embedded in a GaAsP NW. The brighter region, revealing the presence of the dot, is marked by the red circle. (b) EDX mapping of the structure. The QD section exhibits a higher As and lower P content than the NW part of NWQDs. (c) Micro PL spectra at different excitation powers from a single GaAsP/GaAs NWQD. Sharp peaks attributed to QD emission are observed at 1.66 eV. The linewidth is measured as narrow as 130
Fig. 6. (Color online) (a) SEM image of InAsP NWs tilted by 45°. The NWs are perpendicular to the Si substrate and their density is estimated at 5.5 × 108 cm–2. (b) Diameter distribution respectively for the InAsP NWs. High uniformity is confirmed. (c) High resolution TEM (HRTEM) of the middle part of an InAsP NW. Multiple stacking faults are observed. The inset presents the SAED pattern of this part. The streaky features confirm the formation of stacking faults. (d) HRTEM of the NW/Si interface. Misfit dislocations appear and are marked by yellow arrows in the image. In the inset the SAED pattern of the interface is shown. The clear spots reveal a pure ZB structure at the NW/Si interface, which leads to the conclusion of stacking faults being developed after the nucleation of the InAsP NWs at the initial stages of the growth. (
Fig. 7. (Color online) (a)–(c) SEM images of NWs grown on patterned substrate with pitch lengths of 1200, 800 and 400 nm, respectively. The density of the NWs is significantly increased with decreasing length of the pitch. d) PL spectra of NWs grown at different pitch lengths. Increasing size of the pitch leads to a redshift of the emission attributed to an increased presence of Sb in the NWs. That is in accordance with the Sb-richness induced by the increasing wetting angle of the droplet with enlarged holes. (
Fig. 8. (Color online) (a) Normalized PL spectra of GaAsSb NWs grown on Si substrates, with different Sb content. The measurements are taken at 77 K and the wavelength of the emission reaches 1480 nm. (b) Normalized PL spectra of GaAsSb NWs grown on GaAs stems, with different Sb content. The measurements are taken at 77 K and the wavelength of the emission reaches 1760 nm. (Reprinted with permission from Ref. [
Fig. 9. (Color online) (a) SEM image of InAsSb NWs grown at 470 °C. The structures are vertically aligned on the (111)-oriented substrate. (b) SEM image of InAsSb NWs grown at 450 °C. The decreasing temperature forces the NWs to change orientation and elongate planar on the substrates. (
Fig. 10. (Color online) (a) SEM of an AlGaAs NW array grown on Si at 510 °C with a nominal composition of Al at 30%. (b) Cross sectional EDX scanning of an AlGaAs NW. The peaks of Al and dips of Ga at the external facets reveal the presence of an Al-rich shell. As expected, Arsenic is homogeneously distributed in the structure. (c) TEM image of a NW, revealing its inversed tapered shape. The darker colour of the shell reveals its higher percentage of Al. (
Fig. 11. (Color online) (a)–(h) SEM images of InGaAs NWs grown via MBE following SAG mode. The arrays of the grown NWs have a high level of homogeneity. NWs were grown at different temperatures with different Ga compositions, as indicated in each image. (i) Normalized micro PL spectra of InGaAs NWs grown at different Ga composition. A wide range of tuning is accomplished. (
Fig. 12. (Color online) (a)–(f) SEM images of InGaP NWs grown on InP substrates. The different temperatures of the growth are noted in the images. It is observed that low growth temperatures led to shorter NWs and promoted radial overgrowth (
Fig. 13. (Color online) (a) Schematics of the InGaSb NW, showing the three different segments (InAs stem, InSb stem, InGaSb segment) of the structure. (b) SEM image of the wire-on-stem structures, clearly exhibiting differences in the diameter, between the consecutive segments. The scale bar is 200 nm. (c) EDX axial scanning of the NW. The InGaSb regions correspond with the increase in the Ga line (red). This segment is revealed to be Ga-rich, with approximately 60% Ga content. The scale bar is 100 nm. (Reprinted with permission from Ref. [
Fig. 14. (Color online) (a) SEM image of an AlInP NW array, demonstrating a high degree of morphological homogeneity. (b)–(d) High magnification SEM images of a WZ InP NW and two WZ AlInP NWs with Al content at 15% and 25%, respectively. Increasing Al content leads to a transition of the initial, hexagonal cross section to a more complex dodecagonal form, potentially due to the alterations of V/III ratio and elemental composition. (e) PL spectra of AlInP NW ensembles. Increasing Al content induces a blue shift of the peak towards the green region of the spectrum. For 0–40% Al, emission covers the range between 875 and 555 nm (infrared to green region). (
Fig. 15. (Color online) (a) PL spectra at room temperature for different excitation powers. The insets show a PL spectrum of FP modes below lasing threshold under a pump power density of 1.88 kW/cm2 (left) and a lasing peak with a linewidth of 0.76 nm (right). (b) PL specra of three different samples with Sb compositions of 1%, 5% and 8% for samples A, B and C, respectively. Increasing Sb presence leads to a redshift of the lasing peak enabling tunability between 890 and 990 nm. (
Fig. 16. (Color online) (a) SEM of a GaAsP NW solar cell with InGaAs passivation layer. The scale bar is 1
Fig. 17. (Color online) (a) Schematics of the GaAsP NW, showing the growth of the p-type core and n-type shell, with an intrinsic shell between the two. (b) Schematics of a water splitting device consisted of a NW array grown on Si substrates. (c) Current density potential characteristics of GaAsP homojunction NWs photocathode. (d) Current density potential characteristics of GaAsP NWs photocathode with the addition of an InGaAs passivation shell. The insets in
Fig. 18. (Color online) (a) SEM image of a single GaAsSb NW-based device with four metal electrodes. The scale bar is 500 nm. (b)
Fig. 19. (Color online) (a) SEM (top) and schematics (bottom) of a back-gated FET with metal contacts based on a single InGaAs NW. (b) Transfer characteristics of the FET of
Fig. 20. (Color online) (a)–(c) Tables including III–V–V, III–III–V and rare alloys, respectively, encapsulating the bandgap, growth methods, basic properties and device implementation of the ternary III–V NWs described throughout the current paper.
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Giorgos Boras, Xuezhe Yu, Huiyun Liu. III–V ternary nanowires on Si substrates: growth, characterization and device applications[J]. Journal of Semiconductors, 2019, 40(10): 101301
Category: Reviews
Received: Jul. 1, 2019
Accepted: --
Published Online: Sep. 22, 2021
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