Fig. 1. Near-field profile; (a) before the damage occurs; (b) after the damage occurs.

Fig. 2. Schematic drawing of the main laser optical system of the SG-III.

Fig. 3. Experimental setup.

Fig. 4. Damaging morphology of IM0.

Fig. 5. Stray light profile measured in the PAM shot.

Fig. 6. Stray light profile measured in the first main shot.

Fig. 7. Back-reflected light spot on the pinhole of the spatial filter.

Fig. 8. Stray light profile measured in the second main shot.