Piezoelectrics & Acoustooptics, Volume. 46, Issue 2, 207(2024)
Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope
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LIU Junyu, PIAO Linhua, TONG Jiacheng, MA Xuanlin. Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope[J]. Piezoelectrics & Acoustooptics, 2024, 46(2): 207
Paper Information
Received: Oct. 9, 2023
Accepted: --
Published Online: Aug. 29, 2024
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