Piezoelectrics & Acoustooptics, Volume. 46, Issue 2, 207(2024)

Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope

LIU Junyu, PIAO Linhua, TONG Jiacheng, and MA Xuanlin
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    In this paper, a new independently sensitive micro-electromechanical system (MEMS) thermal expansion-flow gyroscope is proposed and its sensitivity mechanism is revealed. A three-dimensional model of the structure was created using the COMSOL multiphysics simulation software and finite-element calculations of the temperature field of its sensitive structure were performed. The computational results show that at a 50 mW heater power and an angular-velocity variation range of -10 rad/s-10 rad/s, this gyro has a gyroscopic effect with a temperature sensitivity of 0.224 K·(rad·s-1)-1 and a nonlinearity of 2.37%, and a sensitivity of 1.8 mV·(rad·s-1)-1 and a nonlinearity of 2.06%. This gyro has a high sensitivity and simple process. In addition, this study lays a theoretical basis for subsequent structure optimizations.

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    LIU Junyu, PIAO Linhua, TONG Jiacheng, MA Xuanlin. Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope[J]. Piezoelectrics & Acoustooptics, 2024, 46(2): 207

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    Paper Information

    Received: Oct. 9, 2023

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.02.013

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