Chinese Journal of Lasers, Volume. 36, Issue 1, 198(2009)
Process Control of High Reflectance Mirrors Preparation in Transition Region by Reactive Magnetron Sputtering
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Zhang Shengwu, Huang Feng, Li Ming, Song Qiuming, Xie Bin, Wang Haiqian, Zhao Dongfeng, Chen Yang, Jiang Yousong, Song Yizhou. Process Control of High Reflectance Mirrors Preparation in Transition Region by Reactive Magnetron Sputtering[J]. Chinese Journal of Lasers, 2009, 36(1): 198