Chinese Journal of Lasers, Volume. 36, Issue 1, 198(2009)

Process Control of High Reflectance Mirrors Preparation in Transition Region by Reactive Magnetron Sputtering

Zhang Shengwu1、*, Huang Feng1, Li Ming1, Song Qiuming1, Xie Bin1, Wang Haiqian1, Zhao Dongfeng2, Chen Yang2, Jiang Yousong3, and Song Yizhou3
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  • 1[in Chinese]
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    Zhang Shengwu, Huang Feng, Li Ming, Song Qiuming, Xie Bin, Wang Haiqian, Zhao Dongfeng, Chen Yang, Jiang Yousong, Song Yizhou. Process Control of High Reflectance Mirrors Preparation in Transition Region by Reactive Magnetron Sputtering[J]. Chinese Journal of Lasers, 2009, 36(1): 198

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    Paper Information

    Category: materials and thin films

    Received: Jan. 18, 2008

    Accepted: --

    Published Online: Feb. 10, 2009

    The Author Email: Shengwu Zhang (zhshw@mail.ustc.edu.cn)

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