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Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 313(2023)

Preparation and Static Performance Testing of Piezoelectric Actuators with Equally Spaced Spiral Electrodes

ZHANG Shuliang1, LIU Yonggang1,2, LI Haiji1, and WANG Yateng1
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    ZHANG Shuliang, LIU Yonggang, LI Haiji, WANG Yateng. Preparation and Static Performance Testing of Piezoelectric Actuators with Equally Spaced Spiral Electrodes[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 313

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    Paper Information

    Received: Sep. 16, 2022

    Accepted: --

    Published Online: Nov. 29, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.02.026

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology