Laser & Optoelectronics Progress, Volume. 52, Issue 4, 42203(2015)

A New PCB Digital Lithograph Projection Imaging Technology

Liu Zhitao*, Zhou Jinyun, Liu Lixia, Guo Hua, and Kuang Jian
Author Affiliations
  • [in Chinese]
  • show less
    References(13)

    [1] [1] Jain, Dunn T J, Black P P. High-speed,high-resolution large-area exposure system for PCB patterning [J]. Printed Circuit Fabrication, 1997, 20(5): 34-36.

    [2] [2] Jain K, Zemel M, Klosner M. Large- area high- resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication [J]. Proceedings of the IEEE, 2002, 90(10): 1681-1688.

    [6] [6] Cai Yanmin, Wang Xiangzhao, Huang Huijie. Optical design of lithography projective lens with variable total track [J]. Chinese J Lasers, 2014, 41(4): 0416003.

    [7] [7] Yao Yuan, Wang Dejiang, Xu Zhengping, et al.. Design of target simulator based on DMD for infrared imaging guided system [J]. Laser& Optoelectronics Progress, 2013, 50(7): 072302.

    [8] [8] Wang Zhanliang, Hang Yongan, Qian Xiaofan, et al.. The research of real- time observation of temperature field by using digital holography and DMD [J]. Laser Journal, 2009, 30(6): 36-38.

    [9] [9] Li Dan, Xue Yunyun, Cao Wen, et al.. Optimization of DMD illumination system with microlens array [J]. Acta Optica Sinica, 2013, 33(1): 0122002.

    [10] [10] Mei W. Point Array Maskless Lithography: US, 6473237B2 [P]. 2002-10-29.

    [11] [11] Chan K F, Feng Z, Yang R, et al.. High- resolution maskless lithography [J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 2003, 2(4): 331-339.

    [12] [12] Xu Zhengping. Application of digital micromirror device in photoelectric equipment [J]. Laser & Optoelectronics Progress, 2014, 51(5): 051103.

    Tools

    Get Citation

    Copy Citation Text

    Liu Zhitao, Zhou Jinyun, Liu Lixia, Guo Hua, Kuang Jian. A New PCB Digital Lithograph Projection Imaging Technology[J]. Laser & Optoelectronics Progress, 2015, 52(4): 42203

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Aug. 1, 2014

    Accepted: --

    Published Online: Apr. 9, 2015

    The Author Email: Liu Zhitao (154168728@qq.com)

    DOI:10.3788/lop52.042203

    Topics