Fig. 1. COMSOL wave optics simulation model and results. (a) Simulation model for transmittance of MMS; (b) transmittance spectral of MMS with periods of 1.0 μm and 3.0 μm at incident wavelength of 460 nm; (c) average transmittance of MMS with different periods at incident wavelength of 460, 560, and 780 nm; (d)‒(i) transmittance spectra of MMS with different periods at different incident wavelengths

Fig. 2. TracePro geometric optics simulation model and results. (a) Simulation model for LEE and far-field luminous angle of MMS-LED; (b) calculation model for axial light emission probability of flip-chip LEDs with MMS and PSS; (c) calculation model for light emission angle distribution of flip-chip LEDs with MMS and PSS; (d) LEE of MMS-LED with different diameters; (e) LEE of MMS-LED with different pattern heights; (f) luminous angle of MMS-LED with different pattern diameter; (g) luminous angle of MMS-LED with different pattern heights

Fig. 3. Fabrication process of nanoscale MMS

Fig. 4. Testing results of microscopic morphology of nanoscale MMS. (a) SEM image of axial view; (b) SEM image of side view; (c) SEM image of oblique axial view; (d) surface profile of pattern along dense direction tested by AFM