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Chinese Optics Letters, Volume. 22, Issue 9, 090003(2024)

High modulation efficiency thin-film lithium niobate modulator using a three-mode folded phase shifter [Invited]

Jiacheng Liu1, Jiangbing Du1、*, Wenjia Zhang1, Ke Xu2, and Zuyuan He1
Author Affiliations
  • 1State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2Department of Electronic and Information Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China
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    (a) Schematic structure of the proposed device. (b) Microscope image of the fabricated device. (c) SEM image of the TE0–TE2 mode converter. (d) SEM image of the MMI power splitter. (e) SEM image of the gold electrodes and the LN waveguides.

    Fig. 1. (a) Schematic structure of the proposed device. (b) Microscope image of the fabricated device. (c) SEM image of the TE0–TE2 mode converter. (d) SEM image of the MMI power splitter. (e) SEM image of the gold electrodes and the LN waveguides.

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    (a) Transmission spectrum of the fabricated device. (b) Zoom-in view of the transmission spectrum.

    Fig. 2. (a) Transmission spectrum of the fabricated device. (b) Zoom-in view of the transmission spectrum.

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    100-kHz triangular wave sweep for (a) the proposed device and (b) the conventional MZM.

    Fig. 3. 100-kHz triangular wave sweep for (a) the proposed device and (b) the conventional MZM.

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    (a) Mode effective index variations for different waveguide modes as a function of the electrode gap. The simulated mode profiles of (b) the TE0 mode in single-mode waveguide, (c) the TE0 mode, (d) the TE1 mode, and (e) the TE2 mode in the multimode waveguide.

    Fig. 4. (a) Mode effective index variations for different waveguide modes as a function of the electrode gap. The simulated mode profiles of (b) the TE0 mode in single-mode waveguide, (c) the TE0 mode, (d) the TE1 mode, and (e) the TE2 mode in the multimode waveguide.

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    Measured EO frequency response of the proposed device.

    Fig. 5. Measured EO frequency response of the proposed device.

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    (a) Experimental setup for the high-speed data transmission. The OOK eye diagrams at (b) 10, (c) 15, and (d) 20 Gb/s.

    Fig. 6. (a) Experimental setup for the high-speed data transmission. The OOK eye diagrams at (b) 10, (c) 15, and (d) 20 Gb/s.

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    • Table 1. Performance Comparison of the TFLN Interferometric Modulator

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      Table 1. Performance Comparison of the TFLN Interferometric Modulator

      ReferenceStructureVπL (V·cm)Electrode gap (μm)Bandwidth (GHz)Phase shifter length
      [26]MIM1.45121 mm
      [27]MIM1.26.517.51 mm
      [28]MIM1.065400.6 mm
      [29]MZM1.755>405 mm
      [30]MZM1.25>404 mm
      [31]MZM1.321.237.5 mm
      This workMZM115.66120.5 mm
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    Jiacheng Liu, Jiangbing Du, Wenjia Zhang, Ke Xu, Zuyuan He, "High modulation efficiency thin-film lithium niobate modulator using a three-mode folded phase shifter [Invited]," Chin. Opt. Lett. 22, 090003 (2024)

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    Paper Information

    Special Issue: SPECIAL ISSUE ON THE 40TH ANNIVERSARY OF INSTITUTE OF MODERN OPTICS, NANKAI UNIVERSITY

    Received: Mar. 11, 2024

    Accepted: May. 29, 2024

    Published Online: Aug. 29, 2024

    The Author Email: Jiangbing Du (dujiangbing@sjtu.edu.cn)

    DOI:10.3788/COL202422.090003

    CSTR:32184.14.COL202422.090003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology