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Acta Optica Sinica, Volume. 32, Issue 3, 322005(2012)

Thermal and Structural Deformation of Projection Optics and Its Influence on Optical Imaging Performance for 22 nm Extreme Ultraviolet Lithography

Yang Guanghua* and Li Yanqiu
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    Yang Guanghua, Li Yanqiu. Thermal and Structural Deformation of Projection Optics and Its Influence on Optical Imaging Performance for 22 nm Extreme Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(3): 322005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Aug. 25, 2011

    Accepted: --

    Published Online: Feb. 8, 2012

    The Author Email: Guanghua Yang (ygh_2011@126.com)

    DOI:10.3788/aos201232.0322005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology