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Acta Optica Sinica, Volume. 31, Issue 4, 412003(2011)

3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy

Wang Yunxin1,2、*, Wang Dayong1,2, Zhao Jie1,2, Li Yan1,2, and Wan Yuhong1,2
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    Wang Yunxin, Wang Dayong, Zhao Jie, Li Yan, Wan Yuhong. 3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy[J]. Acta Optica Sinica, 2011, 31(4): 412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 21, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Yunxin Wang (yxwang@bjut.edu.cn)

    DOI:10.3788/aos201131.0412003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology