Researching | Research on jitter compensation algorithm in spectral confocal thickness measurement system

Infrared and Laser Engineering, Volume. 53, Issue 1, 20230444(2024)

Research on jitter compensation algorithm in spectral confocal thickness measurement system

Chunyan Li, Danlin Li^*, Jihong Liu, Chang Liu, Ke Li, and Jiewei Jiang

Author Affiliations

School of Electronic Engineering, Xi'an University of Posts & Telecommunications, Xi'an 710121, China

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References (18)

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References(18)

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[5] Fuerst M E, Csencsics E, Haider C, et al. Confocal chromatic sensor with an actively tilted lens for 3D measurement[J]. Journal of the Optical Society of America A, 37, B46(2020).

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[9] Zhu Wanbin, Zhong Jun, Mo Renyun, . Design of Spectral Confocal Chromatic Displacement Sensor Objective[J]. Opto-Electronic Engineering, 37, 62-66(2010).

[10] Molesini G, Pedrini G, Poggi P, et al. Focus-wavelength encoded optical profilometer[J]. Optics Communications, 49, 229-233(1984).

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[13] Li Chunyan, Li Gengpeng, Liu Jihong, et al. Influence of eccentricity and tilt of radial grin lens on its thickness measurement by chromatic confocal technology[J]. Optical Engineering, 60, 094107(2021).

[14] Li Chunyan, Li Gengpeng, Liu Jihong, . Analysis and research on spectral confocal displacement measurement method based on GRNN[J]. Acta Photonica Sinica, 51, 0330001(2022).

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Chunyan Li, Danlin Li, Jihong Liu, Chang Liu, Ke Li, Jiewei Jiang. Research on jitter compensation algorithm in spectral confocal thickness measurement system[J]. Infrared and Laser Engineering, 2024, 53(1): 20230444

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Paper Information

Category:

Received: Jul. 14, 2023

Accepted: --

Published Online: Mar. 19, 2024

The Author Email: Danlin Li (18909196613@163.com)

DOI:10.3788/IRLA20230444

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology