Fig. 1. AM1.5 solar spectrum and spectral response characteristic curves of crystalline silicon solar cell

Fig. 2. Structural diagram of ITO/SiN_x/SiO_x triple-layer antireflection film

Fig. 3. Reflection spectra and weighted average reflectivity versus incident angle. (a) Reflection spectra of antireflection film with or without considering refractive index dispersion effect; (b) weighted average reflectivity versus incident angle

Fig. 4. Refractive index dispersion curve of each layer

Fig. 5. Reflection and absorption spectra of ITO single-layer antireflection film and ITO/SiN_x/SiO_x triple-layer antireflection film

Fig. 6. Reflection and optical loss spectra of antireflection film on planar silicon and textured silicon surfaces

Fig. 7. Absorption spectrum of antireflection film on planar silicon and textured silicon surfaces

Fig. 8. Current density-voltage characteristics of crystalline silicon solar cells based on planar silicon and textured silicon

Fig. 9. Variations of optical loss of antireflection film on textured silicon surface and conversion efficiency of corresponding solar cell with film thickness of each layer. (a) Variation of optical loss with film thickness; (b) variation of conversion efficiency with film thickness